Plasma Chamber Temperature Controller with Adaptive Three-Way Valve
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Solution Overview
Problem
The temperature controller in plasma-processing apparatuses is not interlocked with the power of the plasma, leading to inconsistent inner temperatures within the plasma chamber, resulting in errors during the plasma-processing process.
Innovation Solution
A temperature controller with both heating and cooling units is integrated into the plasma-processing apparatus, featuring a three-way valve system that adjusts coolant flow based on detected plasma power to maintain the upper electrode's temperature, ensuring accurate temperature control of the liner and subsequently the upper electrode assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the temperature controller is not interlocked with plasma power, then the device complexity is reduced, but the temperature control precision deteriorates
Solution Approach 1:
The temperature controller is interlocked with plasma power through a feedback mechanism where the controller detects plasma power levels and automatically adjusts coolant flow via a three-way valve to maintain accurate temperature control, resolving the contradiction by making the system adaptive rather than static
Solution Approach 2:
The temperature control system transitions from a static configuration to a dynamic one by enabling real-time adjustment of coolant flow based on plasma power variations, allowing the system to adapt to changing conditions while maintaining temperature precision
2Manufacturing precision
If the temperature controller is interlocked with plasma power, then the temperature control precision is improved, but the device complexity increases
Solution Approach 1:
A three-way valve is introduced as an intermediary component between the temperature controller and coolant supply, enabling automated temperature adjustment based on plasma power without requiring complex direct control mechanisms, thus improving precision while limiting complexity increase
3Ease of operation
If coolant flow is not adjusted according to plasma power, then the ease of operation is improved, but the temperature stability deteriorates
Solution Approach 1:
The temperature control system operates autonomously by automatically detecting plasma power levels and adjusting coolant flow through the three-way valve without requiring manual intervention, maintaining temperature stability while preserving ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise temperature control of the upper electrode assembly, maintaining the set process temperature and reducing errors in the plasma-processing process, ensuring consistent and accurate plasma processing.
Implementation Method 1
The heating unit may be configured to heat a liner on an inner surface of a plasma chamber
Implementation Method 2
The cooling unit may be configured to cool the liner to control a temperature of an upper electrode
Implementation Method 3
a three-way valve configured to control an amount of the coolant supplied to the main cooling passageway and the bypass passageway
Data Source
AI summary
A temperature controller of a plasma-processing apparatus including a heating unit and a cooling unit. The heating unit is configured to heat a liner on an inner surface of a plasma chamber in which a plasma is formed. The cooling unit is configured to cool the liner to controls a temperature of an upper electrode in the plasma chamber.