Automated Consumable Part Replacement in Plasma Processing Systems

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Solution Overview

Problem

Current semiconductor wafer manufacturing processes require extensive downtime and manual intervention to replace consumable parts within cluster tool assemblies, leading to inefficiencies and increased costs due to the need to break vacuum and risk of contamination.

Innovation Solution

A cluster tool assembly with a replacement station that allows for the removal and replacement of consumable parts without breaking vacuum, utilizing a robot and lift mechanism to access and exchange consumable parts within the process module, maintaining the vacuum state and minimizing contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual replacement of consumable parts is performed by breaking vacuum, then access to consumable parts is achieved, but downtime increases and contamination risk arises

Engineering Contradiction:

ImproveAccess to consumable partsVSAvoidDowntime for replacement

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

A robotic end effector serves as an intermediary between the vacuum environment and the consumable parts, enabling automated manipulation and replacement without breaking vacuum. The robot interface with the process module through a sealed interface, allowing the robotic arm to access and replace consumable parts while maintaining the vacuum barrier.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The manual mechanical operation of technicians is replaced with an automated robotic system. The robot performs the replacement operations through programmed sequences, eliminating the need for manual intervention and vacuum breaking, thereby reducing downtime and contamination risk.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Ease of repair

If manual replacement of consumable parts is performed, then consumable parts can be replaced, but contamination risk increases

Engineering Contradiction:

ImproveReplacement of consumable partsVSAvoidContamination risk

Core Design Contradiction:

Ease of repairVSObject-affected harmful factors

Solution Approach 1:

The robotic end effector acts as a sterile intermediary that operates within the vacuum environment without introducing contaminants. The robot's sealed interface and vacuum-compatible design prevent contamination during the replacement process.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The vacuum environment serves as an inert atmosphere that prevents contamination. By maintaining vacuum throughout the replacement process and using a robot that is compatible with this environment, the system eliminates the introduction of atmospheric contaminants that would occur with manual vacuum breaking.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

3Manufacturing precision

If automated robot is used for replacement, then precision and alignment improve, but system complexity increases

Engineering Contradiction:

ImproveAlignment of consumable partsVSAvoidSystem complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The robotic end effector is designed with universal functionality to handle multiple consumable part types and perform various operations (installation, removal, positioning). This multi-functionality reduces the need for multiple specialized tools and simplifies the overall system architecture.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system incorporates self-alignment features where the consumable parts are designed to automatically position themselves relative to the process module during installation. The robot simply needs to place the part in the correct location, and mechanical features ensure precise alignment without requiring complex robotic positioning systems.

Inventive Principle:

Principle #25Self-service

Data Source

PatentUS10427307B2Automated replacement of consumable parts using end effectors interfacing with plasma processing system

Publication Date: 2019.10.01 LAM RES CORP

AI summary

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.