Plasma Generator with Spark Ignition and Particle Storage
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Solution Overview
Problem
Conventional plasma generator systems face challenges in reliable initial plasma generation, leading to repeated attempts and increased downtime, and expose surrounding components to high power, reducing their operational lifespan and increasing maintenance costs.
Innovation Solution
The plasma generator system incorporates a container with enhanced electric field capabilities and charged particle storage, a controlled gas flow distribution system, and a power management circuit to efficiently form and store plasma, reducing power exposure and improving plasma generation reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high power (at least 1000 Watts) is supplied to the coil to ignite the processing gas, then plasma generation is achieved, but surrounding system components are exposed to high voltages which reduces their useful lives and increases repair frequency
Solution Approach 1:
The system separates the ignition function from the plasma maintenance function by introducing a spark generator that provides initial ionization, allowing the main RF coil to operate at lower power levels for plasma sustainment rather than repeated high-power ignition attempts
Solution Approach 2:
The spark generator performs preliminary ionization of the processing gas before RF plasma ignition, creating initial charged particles that enable more reliable and lower-power plasma startup, reducing the need for repeated high-power attempts
2Reliability
If repeated attempts at plasma ignition are performed, then plasma generation reliability is improved, but downtime between workpiece processing increases
Solution Approach 1:
The spark generator performs preliminary ionization of the processing gas before RF plasma ignition, creating initial charged particles that enable more reliable and lower-power plasma startup, reducing the need for repeated high-power attempts
Solution Approach 2:
The system replaces mechanical/repeated thermal ignition attempts with an electrical discharge (spark) mechanism that provides reliable initial ionization, enabling faster and more consistent plasma startup
3Reliability
If high power is supplied to the coil for plasma ignition, then plasma is generated, but repair frequency and costs increase due to reduced useful lives of surrounding components
Solution Approach 1:
The system separates the ignition function from the plasma maintenance function by introducing a spark generator that provides initial ionization, allowing the main RF coil to operate at lower power levels for plasma sustainment rather than repeated high-power ignition attempts
Solution Approach 2:
The spark generator acts as an intermediary device that facilitates plasma ignition without requiring the main RF coil to deliver high ignition power, thereby protecting surrounding components from high voltage exposure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances plasma generation reliability, reduces downtime between processes, and extends the lifespan of system components, thereby lowering maintenance costs and improving overall system efficiency.
Implementation Method 1
the coil is energized to create an electric field within the plasma chamber
Implementation Method 2
a portion of the processing gas is ignited and transforms into a plasma, which may include reactive species such as electrons, ions, and reactive radicals
Data Source
AI summary
Systems and methods of forming plasma are provided. In an embodiment, by way of example only, a plasma generation system includes a container comprising an insulating material, a means for forming a first plasma within the container from a processing gas, the first plasma including charged particles, a means for extracting a portion of the charged particles from the first plasma and storing the portion of extracted charged particles on the insulating material, and a means for forming a second plasma from the extracted portion of the charged particles and a second portion of the processing gas.