Thermochemical Hardening via Low-Pressure Plasma Nitriding

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Solution Overview

Problem

Current processes for thermochemical hardening of workpieces lack precision in setting carbon and nitrogen profiles, are inefficient in terms of energy consumption, and result in environmental pollution, while also being inflexible and low in productivity.

Innovation Solution

A process involving carburization and nitriding steps in low-pressure gas atmospheres, with the use of discharge plasma and active grid electrodes to maintain high temperatures and precise control over gas compositions, combined with a flexible and high-productivity apparatus design that allows for rapid processing and reduced energy use.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional thermochemical hardening processes are used, then workpieces undergo carburization and nitriding, but precise control over carbon and nitrogen profiles is not achieved

Engineering Contradiction:
Improvecarbon and nitrogen profile controlVSAvoidprocess control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The process is divided into distinct sequential steps (carburization, diffusion, nitriding) with separate process parameters for each step. This segmentation allows independent optimization and precise control of carbon and nitrogen profiles without interference, directly resolving the contradiction between manufacturing precision and device complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs systematic parameter changes including pressure variations (1-100 mbar ranges), temperature adjustments (900-1050°C for carburization, 800-1050°C for nitriding), and gas composition modifications. These controlled parameter changes enable precise manipulation of diffusion rates and surface concentrations to achieve desired carbon and nitrogen profiles.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If traditional hardening processes are used, then workpieces are treated, but energy consumption is high

Engineering Contradiction:
Improveenergy consumptionVSAvoidprocessing efficiency
Core Design Contradiction:
Use of energy by moving objectVSProductivity

Solution Approach 1:

The process maintains continuous useful action by performing carburization, diffusion, and nitriding in sequential steps without removing workpieces from the vacuum chamber. The vacuum environment is maintained throughout, and gas atmospheres are changed in-situ, eliminating energy-intensive heating/cooling cycles and chamber evacuation/repressurization, thus reducing energy consumption while maintaining productivity.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The invention uses a vacuum environment (1-100 mbar) as an inert atmosphere throughout the entire process. This eliminates the need for atmospheric protection measures and allows direct thermal processing without oxidation, reducing energy consumption compared to conventional atmospheric processes that require protective gas flows and frequent pressure changes.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Object-affected harmful factors

If conventional processes are used, then workpieces are hardened, but environmental pollution occurs

Engineering Contradiction:
Improveenvironmental pollutionVSAvoidprocess simplicity
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The vacuum environment (1-100 mbar) serves as a clean, inert atmosphere that prevents contamination and eliminates the release of harmful gases into the environment. By conducting all steps in-situ without atmospheric exposure, the process avoids pollution from protective gas emissions and waste heat discharge, while maintaining manufacturing simplicity through the unified vacuum chamber design.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

4Productivity

If standard processing methods are used, then workpieces are treated, but productivity is low and charging flexibility is limited

Engineering Contradiction:
Improveprocessing speed and flexibilityVSAvoidapparatus configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The vacuum chamber serves multiple functions: it provides the processing environment for carburization, diffusion, and nitriding steps, and also serves as the containment for all process gases. This multi-functionality eliminates the need for separate chambers for each process step, increasing productivity and charging flexibility while reducing overall device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Workpieces are pre-heated and the vacuum chamber is pre-evacuated before introducing process gases. This preliminary action ensures that workpieces reach optimal temperature ranges (900-1050°C for carburization, 800-1050°C for nitriding) before treatment begins, and the vacuum environment is established beforehand, enabling rapid process initiation and improving overall productivity.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables precise control over carbon and nitrogen profiles, significantly reduces energy consumption, minimizes environmental impact, and enhances productivity by allowing for rapid processing and flexible workpiece handling.

Implementation Method 1

the nitrogen-containing gas atmosphere contains molecular nitrogen (N2) as donor gas and is excited by means of a discharge plasma

Methodology Applied
Scientific EffectDischarge plasma: Plasma

Implementation Method 2

optionally one or more diffusion steps, in each case in a gas atmosphere having a pressure of less than 100 mbar

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS10626490B2Process and apparatus for thermochemically hardening workpieces
Publication Date: 2020.04.21 ALD VACUUM TECH GMBH
  • US10626490B2 patent drawing
  • US10626490B2 patent drawing
  • US10626490B2 patent drawing

AI summary

A process and apparatus for thermochemically hardening workpieces is provided incorporating the following steps, carried out in a variable sequence: one or more carburizing steps, each in a carbon-containing gas atmosphere at a pressure of less than 50 mbar, the workpieces being held at temperatures of 900 to 1050° C.; if appropriate, one or more diffusion steps, each in a gas atmosphere at a pressure of less than 100 mbar; and one or more nitriding steps, each in a nitrogen-containing discharge plasma at a pressure of less than 50 mbar, the workpieces being held at temperatures of 800 to 1050° C.