Plasma Reactor Heating Apparatus Zoned Temperature Control

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Solution Overview

Problem

Conventional plasma reactors have complex circuit structures due to the need for multiple electronic switches for zoned temperature control, which complicates the control process and increases the complexity of the heating apparatus.

Innovation Solution

A plasma reactor with a heating apparatus utilizing a programmable power supply and bandpass filters to achieve zoned temperature control, eliminating the need for switch elements and simplifying the circuit structure by matching AC heating powers with conduction frequencies of bandpass filters to heat specific heater units.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If electronic switches are provided for each heater unit to achieve zoned temperature control, then temperature control precision is improved, but circuit structure complexity increases

Engineering Contradiction:

Improvetemperature control precisionVSAvoidcircuit structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces electronic switch elements with a frequency-based filtering system. Instead of using mechanical/electronic switches to control heater units, the invention uses bandpass filters with specific center frequencies to selectively conduct AC power to different heater units. This substitution eliminates the need for complex switch elements while maintaining zoned temperature control capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the control parameter from binary switch states to continuous frequency selection. By varying the center frequency of the bandpass filter, different heater units can be selectively activated. This parameter-based control approach replaces discrete switch elements with a continuous frequency tuning mechanism, simplifying the overall circuit structure while preserving precise temperature control.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If multiple electronic switches are used for zoned temperature control, then heating control flexibility is improved, but ease of operation deteriorates

Engineering Contradiction:

Improveheating control flexibilityVSAvoidcontrol manner simplicity

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The bandpass filter assembly serves multiple functions simultaneously: it acts as a frequency selector, a circuit isolator, and a power distributor. A single bandpass filter component performs what would otherwise require multiple switch elements and control circuits, thereby improving ease of operation while maintaining heating control flexibility through frequency adjustment.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Device complexity

If a programmable power supply with bandpass filters is used, then device complexity is reduced, but measurement precision requirements increase

Engineering Contradiction:

Improvecircuit structure simplicityVSAvoidfrequency matching precision

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The bandpass filter acts as an intermediary between the programmable power supply and the heater units. It mediates the frequency selection process, automatically filtering out frequencies that do not match its center frequency. This intermediary function reduces the need for complex control circuitry while maintaining precise frequency matching through the inherent frequency-selective properties of the filter.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for precise zoned temperature control with a simpler circuit structure and control manner, enhancing the efficiency and reliability of the plasma reactor's heating process.

Implementation Method 1

the heater assembly being connected to the programmable power supply via a bandpass filter assembly, the bandpass filter assembly including a plurality of bandpass filters; wherein the programmable power supply inputs, based on match relationships between outputted AC heating powers and conduction frequencies of the bandpass filters, an AC heating power to a matched heater unit to perform heating

Methodology Applied

Scientific EffectBandpass filter frequency selection: Filter (electronic)

Implementation Method 2

an AC heating power to a matched heater unit to perform heating

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS11363680B2Plasma reactor and heating apparatus therefor

Publication Date: 2022.06.14 ADVANCED MICRO FAB EQUIP INC CHINA

AI summary

Disclosed are a plasma reactor and a heating apparatus therefor, wherein the heating apparatus comprises: a programmable power supply, a heater assembly, and a bandpass filter assembly, the heater assembly being configured for connecting with the programmable power supply via the bandpass filter assembly, the bandpass filter assembly including a plurality of bandpass filters, wherein the programmable power supply may input, based on match relationships between outputted AC heating powers and conduction frequencies of the bandpass filters BPF, an AC heating power to a matched heater unit to perform heating, thereby achieving zoned temperature control; the disclosures offer a simple circuit structure due to eliminating the need of switch elements, thereby offering a simple control manner.