Matrix Heater Control in Plasma Reactors With Single RF Filter
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Solution Overview
Problem
Conventional plasma reactors with independent temperature control zones face challenges in achieving precise temperature control due to excessive temperature differences within zones, requiring numerous heaters and filters that increase complexity, cost, and reduce system reliability, while also being unable to adapt to rapid temperature changes.
Innovation Solution
A plasma reactor with a matrix-type multi-zone temperature control system that uses a heating controller with optoelectrical drive circuits and a single filter to connect multiple heating modules to a common power source, allowing for independent control of each heater through a series connection and electrical isolation to prevent RF interference and leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional independent temperature control zones with ring-shaped heaters are used, then the structure is simple, but the temperature control precision is insufficient due to excessive temperature differences within zones
Solution Approach 1:
The patent divides the temperature control system into multiple independent heating zones arranged in a matrix pattern (e.g., 5×5=25 zones). Each heating zone has its own independently controllable heater, allowing precise local temperature control. This segmentation enables different regions of the substrate to be heated to different temperatures simultaneously, achieving the required temperature control precision while maintaining a relatively simple overall structure.
2Manufacturing precision
If a matrix-type heater array with independent control is implemented, then temperature control precision is improved, but the number of current supply lines and filters increases significantly
Solution Approach 1:
The patent merges multiple current supply lines into a single common current supply line that serves all heating zones. By using a single filter for the entire heater array instead of individual filters for each heater, the system significantly reduces the number of filters and current supply lines required. This merging approach maintains the independent control capability of each heating zone while dramatically simplifying the electrical connection structure.
Solution Approach 2:
The single common current supply line and single filter serve multiple functions by providing power to all 25 heating zones simultaneously. The universal design allows one filter to protect against RF interference for the entire heater array, and one current supply line to distribute power to all zones, eliminating the need for 25 separate filters and multiple current supply lines.
3Device complexity
If passive heating control with sequential scanning is used, then the number of filters is reduced, but the system cannot adapt to rapid temperature changes
Solution Approach 1:
The patent implements dynamic control of the heating zones by enabling simultaneous and independent adjustment of power to each heating zone. Unlike sequential scanning that heats zones one at a time, this dynamic system can rapidly change temperature distribution across all zones concurrently. The electronic switching mechanism allows each heating zone to be independently activated or adjusted in real-time, providing the adaptability needed for rapid temperature changes while maintaining a simplified filter structure.
4Object-affected harmful factors
If multiple filters are installed for each current supply line, then RF interference is blocked, but the cost and space occupation increase significantly
Solution Approach 1:
The patent combines multiple current supply lines into a single common current supply line and installs only one filter on this unified line. This merging approach reduces the number of filters from potentially 25 (one per heater) to just one, significantly reducing both cost and space occupation while still providing adequate RF interference blocking for the entire heater array.
Solution Approach 2:
The single filter serves a universal protective function for all heating zones by filtering the common current supply line that powers all 25 heaters. This one filter performs the RF interference blocking function that would otherwise require 25 separate filters, achieving the same level of RF protection with minimal cost and space investment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the structure, reduces costs, and enhances system reliability by enabling rapid temperature distribution changes and simultaneous heating of multiple zones without significant RF power loss or interference, improving the adaptability and efficiency of temperature control.
Implementation Method 1
the optoelectrical drive circuit comprises at least one photocoupler
Implementation Method 2
The heaters 41 may be resistance wires or other devices that may receive current and transform to heating
Implementation Method 3
an electrode 42 for implementing electrostatic adsorption is embedded inside the electrostatic chuck 40, such that when the electrode 42 connects with an external high-voltage direct-current (DC) power supply, the to-be-processed wafer 50 is electrostatically adsorbed to the electrostatic chuck 40
Implementation Method 4
A plasma reactor, which comprises a chamber 100; and an electrically conductive base 30 disposed at the bottom inside the cavity, wherein the electrically conductive base further serves as the lower electrode to be connected to at least one high-frequency radio-frequency (RF) power supply 19. After the plasma above the wafer (or other shaped substrate) is ignited, the RF power supply 19 may adjust plasma concentration or energy.
Data Source
AI summary
Disclosed is a plasma reactor, comprising: a reaction chamber; a base disposed at the bottom of the reaction chamber, configured for supporting a substrate; an RF power supply which outputs an RF power into the reaction chamber, wherein the base includes an electrostatic chuck, the electrostatic chunk including a set of heaters, the set of heaters including a plurality of heating modules, wherein each heating module includes one heater and one electronic switch which are connected in series, the heater in each heating module being connected to one of the heating power source and the ground, and the electronic switch being connected to the other one of the heating power source and the ground; a heating controller including a receive end configured for receiving a temperature control signal, and further a drive signal output end connected to the electronic switch, configured for outputting a drive signal of the electronic switch, wherein the heating controller further comprises at least one optoelectrical drive circuit to cause the receive end of the heating controller to be electrically isolated from the drive signal output end.