Plasma RF Waveform Feedback via EtherCAT for PEALD Control
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Solution Overview
Problem
Conventional PEALD apparatuses cannot monitor and report analog data related to plasma emission in real time, limiting the ability to link this data with trend data and provide feedback for recipe control.
Innovation Solution
The method involves using an Ether CAT protocol to acquire an RF waveform from a reactor in real time, allowing for the adjustment of electric power applied to an RF plate, thereby enabling real-time monitoring and control of plasma emission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a PLC logger is used to monitor analog data relating to plasma emission, then data can be captured and logged, but real-time monitoring and feedback to recipe control cannot be achieved
Solution Approach 1:
The patent implements real-time feedback by having the UPC directly receive analog data from the reactor via Ether CAT network and immediately compare it with trend data to determine whether alarm output should be activated, eliminating the time delay inherent in PLC logger systems that only report data periodically to the PMC
Solution Approach 2:
The patent introduces the UPC as an intermediary device between the reactor and the control system. The UPC receives analog data directly from the reactor through Ether CAT, processes it in real-time, and provides feedback to the recipe control, thereby bridging the gap between data acquisition and control decision-making
2Reliability
If PLC logger software is used to determine alarm necessity, then monitoring can be performed, but system complexity increases and expandability is restricted
Solution Approach 1:
The patent extracts the alarm determination function from the complex PLC logger software and relocates it to the UPC, which has superior processing capabilities. This allows the monitoring function to be maintained while reducing software complexity and increasing expandability, as the UPC can handle multiple monitoring tasks simultaneously without requiring significant software changes
3Ease of operation
If PLC logger is synchronized with recipe execution unit, then monitoring can be executed, but additional settings and software changes are required for expanded functions
Solution Approach 1:
The patent makes the UPC a universal platform that can perform multiple functions including real-time analog data acquisition, trend data comparison, alarm determination, and recipe control feedback. The UPC's Ether CAT interface allows it to directly communicate with the reactor and receive recipe parameters, enabling expanded monitoring functions without requiring additional synchronization settings or software changes
Data Source
AI summary
Examples of a method of manufacturing a semiconductor device includes, in treatment of a substrate with the use of a plasma, acquiring an RF waveform from a reactor through an Ether CAT in real time, the RF waveform being a waveform relating to an electric power to be applied to an RF plate, and adjusting, by using the RF waveform, the electric power to be applied to the RF plate.