Plasma Mounting Table Ring Transfer Using a Shared Lifter Pin
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in easily exchanging consumable components like edge rings and cover rings due to complex internal structures and limited space, which complicates the transfer mechanism and restricts the size and position of components.
Innovation Solution
A mounting table with a lifter pin and driving mechanism that allows for the vertical movement of the lifter pin, enabling the engagement and transfer of edge rings and cover rings by accommodating the lifter pin in a hole corresponding to the through-hole of the cover ring, facilitating the exchange of consumable components without requiring a dedicated transfer mechanism for each component.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a dedicated transfer mechanism is provided for each consumable component (edge ring, cover ring), then the transfer of each component can be performed reliably, but the device complexity increases and the available space for mechanism placement is reduced
Solution Approach 1:
The patent combines multiple transfer functions into a single integrated transfer mechanism. The transfer arm can sequentially transfer both the edge ring and cover ring using the same mechanical structure, thereby reducing device complexity while maintaining transfer reliability through systematic operation sequences
Solution Approach 2:
The transfer mechanism is designed with universal functionality to handle multiple consumable components. The transfer arm and associated mechanisms can adapt to transfer different ring types (edge ring, cover ring) through a unified design, eliminating the need for dedicated mechanisms for each component type
2Ease of operation
If dedicated transfer mechanisms are provided for each consumable component, then each component can be transferred independently, but the internal structure becomes more complex and space utilization is reduced
Solution Approach 1:
Multiple transfer operations are merged into a single compact mechanism located in the center of the mounting table. The transfer arm and support structures are integrated to occupy minimal space while providing independent transfer capability for both edge ring and cover ring through sequential operations
3Volume of stationary object
If the transfer mechanism is made compact to optimize space usage, then space utilization improves, but the mechanism size and position options become more restricted
Solution Approach 1:
The compact transfer mechanism is designed with universal adaptability to perform multiple transfer functions. By positioning the mechanism in the center of the mounting table and designing it with multi-functional capability, the system achieves both compact space utilization and operational versatility for transferring different ring components
Data Source
AI summary
A mounting table includes a wafer mounting surface mounting a wafer, a ring mounting surface disposed at a radially outer side of the wafer mounting surface and mounting a first ring having a first engaging portion and a second ring having a second engaging portion to be engaged with the first engaging portion, a lifter pin, and a driving mechanism. The second ring has a through-hole extends to reach a bottom surface of the first engaging portion, and the ring mounting surface has a hole at a position corresponding to the through-hole. A lifter pin has a first holding part that fits into the through-hole and a second holding part that extends from the first holding part and has a part protruding from the first holding part. The lifter pin is accommodated in the hole, and a driving mechanism vertically moves the lifter pin.