Atmospheric Plasma Apparatus with Segmented Electrodes and Zigzag Gas Passages
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Solution Overview
Problem
Conventional plasma generation apparatuses at atmospheric pressure suffer from unstable and non-uniform plasma generation due to irregular power distribution and gas pressure distribution along the plasma generation electrode, limiting their effectiveness in treating materials like plastics without damaging them.
Innovation Solution
The apparatus features a power supply electrode with a wider power plate and plasma generation electrodes connected in a 'T' shape for uniform power distribution, along with a gas supply unit having a dielectric material and zigzag temperature adjustment passages, ensuring stable voltage supply and uniform gas mixing for consistent plasma generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If conventional plasma generation apparatus uses a simple electrode configuration, then device complexity is reduced, but plasma uniformity and stability deteriorate
Solution Approach 1:
The power supply electrode is divided into multiple plasma generation electrodes arranged in parallel, with each electrode independently connected to the power source. This segmentation allows uniform power distribution across multiple electrodes, creating consistent plasma generation at each location while maintaining overall system simplicity
Solution Approach 2:
Each plasma generation electrode is equipped with its own gas supply passage that delivers gas locally to the discharge space. This local gas supply ensures uniform gas distribution and pressure across different regions, enabling consistent plasma quality throughout the treatment area without requiring complex centralized control
2Device complexity
If conventional plasma generation apparatus uses centralized power supply, then device complexity is reduced, but plasma stability deteriorates
Solution Approach 1:
The power supply system is segmented into multiple independent power supply channels, with each plasma generation electrode connected to the power source through separate passages. This segmentation ensures that power is uniformly distributed to each electrode, maintaining stable plasma generation even when processing large workpieces that require extended treatment areas
3Device complexity
If conventional plasma generation apparatus uses direct gas supply to discharge space, then device complexity is reduced, but plasma uniformity deteriorates
Solution Approach 1:
Gas is supplied through passages that deliver it to the discharge space before plasma generation occurs. This preliminary gas supply ensures that the discharge space is properly filled with gas at the correct pressure and distribution pattern before the plasma discharge begins, enabling uniform plasma generation across the entire treatment area
Solution Approach 2:
Each plasma generation electrode has its own dedicated gas supply passage that delivers gas locally to its corresponding discharge region. This local gas supply strategy ensures uniform gas pressure and flow distribution across different locations, maintaining consistent plasma quality throughout the workpiece treatment area
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for stable and uniform plasma generation at atmospheric pressure, enhancing the plasma generation efficiency and enabling effective surface treatment of materials like plastics without altering their properties.
Implementation Method 1
The power source 150 supplies radio frequency (RF) power to the power supply electrode 110
Implementation Method 2
The gas flow passage 140 is formed between the power supply electrode 110 and the auxiliary plasma ground electrode 130 for supplying gas
Data Source
AI summary
An atmospheric pressure plasma generation apparatus is provided for generating plasma at the atmospheric pressure with stable voltage supply. A plasma generation apparatus of the preset invention includes a first conductor arranged to face a workpiece and having a power plate through power is applied; a second conductor arranged oppositely to a surface facing the workpiece along the first conductor for define a discharge space; and a gas supply unit having a gas supply passage for guiding gas to the discharge space and supporting the first and second conductors. The atmospheric plasma generation apparatus of the present invention is advantageous since the plasma can be uniformly generated in stable manner at an atmospheric pressure on the basis of a stable voltage supply.