Plasma Tool Sensor Data Compression for RF Control Signals
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Solution Overview
Problem
In plasma tools, a large amount of data is generated during wafer processing, which can be overwhelming and inefficient for controlling the plasma tool, as it includes numerous voltage cycles and frequency measurements.
Innovation Solution
A method and system for compressing sensor data in a plasma tool, involving the use of an analog-to-digital converter to convert measurement signals from analog to digital form, and then processing this data using a data compression unit to reduce the amount of data while maintaining critical information for optimized wafer processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a large amount of sensor data is collected during wafer processing, then measurement precision and monitoring capability are improved, but data processing complexity and control system burden increase
Solution Approach 1:
The patent extracts only the critical information from the large volume of sensor data. The data compression unit identifies and retains key parameters such as maximum peak-to-peak values, average frequency values, and phase values, while discarding redundant data. This extraction principle resolves the contradiction by maintaining measurement precision through selective retention of critical data points while significantly reducing data processing complexity.
Solution Approach 2:
The patent creates a compressed representation or copy of the original data that contains only essential information. Instead of processing the complete raw sensor data, the system generates a simplified data structure that mirrors the critical characteristics of the original signal. This copying approach preserves measurement precision for control decisions while reducing the computational burden on the control system.
2Manufacturing precision
If comprehensive sensor data is transmitted to the controller, then control accuracy is improved, but data transmission time and communication load increase
Solution Approach 1:
The data compression unit extracts only the essential control parameters from the comprehensive sensor data before transmission. By identifying and transmitting only the critical information needed for control decisions (maximum peak-to-peak values, average frequency, phase values), the system maintains control accuracy while significantly reducing data transmission time and communication load on the control system.
3Reliability
If raw sensor data is stored for analysis, then data integrity is improved, but storage requirements and processing overhead increase
Solution Approach 1:
The system extracts and stores only the critical parameters from raw sensor data, maintaining data integrity for control purposes while minimizing storage requirements. The data compression unit identifies essential information such as maximum peak-to-peak values, average frequency values, and phase values, preserving the reliability needed for control decisions without the burden of storing complete raw data sets.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compression of data reduces the amount of data used to control the plasma tool, making it more manageable and representative, while also enabling parallel processing and reducing data storage needs, thereby improving the integrity and efficiency of the data.
Implementation Method 1
converting the plurality of measurement signals from an analog form to a digital form to sample data
Data Source
AI summary
Systems and methods for compressing data are described. One of the methods includes receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path is from an output of an RF generator to an electrode of a plasma chamber. The method includes converting the plurality of measurement signals from an analog form to a digital form to sample data and processing the data to reduce an amount of the data. The amount of the data is compressed to output compressed data. The method includes sending the compressed data to a controller for controlling the plasma tool.