Plasma Processing Stage Heater Segmentation for Temperature Control
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Solution Overview
Problem
Existing plasma processing apparatus stages face challenges in controlling the in-plane temperature distribution of substrates due to limitations in the number and configuration of heaters, leading to a narrow settable temperature range and reduced precision in temperature control.
Innovation Solution
The stage incorporates a combination of first and second heaters, with a smaller number of first heaters and a larger number of second heaters, where the first heaters are driven by alternating or direct current from a higher power source and the second heaters by alternating or direct current from a lower power source, allowing for a wider temperature range and precise control of the in-plane temperature distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single type of heater is used in the chuck main body, then the structure is simple, but the settable temperature range is narrow and temperature control precision is reduced
Solution Approach 1:
The heater system is segmented into two distinct types: first heaters arranged in a first pattern and second heaters arranged in a second pattern. This segmentation allows each heater type to contribute differently to temperature distribution, enabling both simple individual structures and precise combined temperature control across a wide range.
2Adaptability or versatility
If more heaters are added to expand temperature range, then temperature control capability improves, but the number of power feeding lines and filters increases causing impedance loss
Solution Approach 1:
Multiple heaters are merged into a unified heating system where first heaters and second heaters work cooperatively. This combining approach achieves wide temperature range and precise control without requiring separate independent power feeding systems for each heater, thereby reducing overall impedance loss.
3Manufacturing precision
If multiple heaters with different configurations are used, then temperature control precision and range improve, but the device complexity increases
Solution Approach 1:
Different regions of the chuck main body are assigned different heater types based on local temperature control requirements. The first heaters and second heaters are distributed in specific patterns to address local heating needs, achieving precise overall temperature distribution control while maintaining reasonable structural organization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a wider settable temperature range and precise control of the in-plane temperature distribution, improving the controllability of the substrate's temperature while reducing the number of power feeding lines and filters required, thus minimizing impedance loss and enhancing the overall temperature control capabilities.
Implementation Method 1
A plurality of first heaters (resistance heating heaters) and a plurality of second heaters (resistance heating heaters) are provided in the chuck main body
Implementation Method 2
The chuck main body is configured to generate electrostatic attractive force between the chuck main body and the substrate placed on the chuck main body, thereby holding the substrate using the generated electrostatic attractive force
Data Source
AI summary
A stage according to an exemplary embodiment has an electrostatic chuck. The electrostatic chuck has a base and a chuck main body. The chuck main body is provided on the base and configured to hold a substrate with electrostatic attractive force. The chuck main body has a plurality of first heaters and a plurality of second heaters. The number of second heaters is larger than the number of first heaters. The first heater controller drives the plurality of first heaters by an alternating current output or a direct current output from a first power source. The second heater controller drives the plurality of second heaters by an alternating current output or a direct current output from a second power source which has electric power lower than electric power of the output from the first power source.