Plasma-Treated h-BN Powder for Higher Thermal Conductivity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Hexagonal boron nitride powders with agglomerated structures require improved thermal conductivity when used as fillers in electronics, as existing plasma treatment methods, such as atmospheric pressure plasma, often destroy the agglomerated structure and increase thermal conductivity anisotropy, while reduced pressure plasma treatment is inefficient for powders and can cause device damage due to high temperatures.
Innovation Solution
A plasma treatment method using reduced pressure plasma treatment under inclined rotation of the treatment container, combined with cooling, to maintain the agglomerated structure and enhance thermal conductivity of hexagonal boron nitride powders, involving a treatment device with a rotating treatment container, plasma gas supply, pressure reduction, and cooling mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If atmospheric pressure plasma treatment is applied to hexagonal boron nitride powder, then surface modification is achieved, but the agglomerated structure is destroyed and thermal conductivity anisotropy increases
Solution Approach 1:
The patent changes the pressure parameter from atmospheric pressure to reduced pressure (1-100 Pa) to perform plasma treatment. This parameter change allows plasma treatment to be effective while preventing destruction of the agglomerated structure, thereby maintaining structural integrity while achieving surface modification.
2Temperature
If reduced pressure plasma treatment is applied to hexagonal boron nitride powder, then thermal conductivity is improved, but treatment efficiency is low and device temperature increases causing damage
Solution Approach 1:
The patent introduces rotation of the treatment container at speeds between 1-100 rpm. This dynamic element ensures uniform plasma exposure of the powder particles, improving treatment efficiency and preventing localized overheating that would cause device damage, while maintaining the thermal conductivity improvements.
Solution Approach 2:
The rotating treatment container creates periodic exposure of different powder regions to the plasma. This periodic action distributes the thermal load uniformly across the device components, preventing temperature accumulation and device damage while maintaining high treatment efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method efficiently achieves higher thermal conductivity in hexagonal boron nitride powders without destroying their agglomerated structure, enabling effective heat dissipation in electronic insulating materials, while preventing device damage through controlled temperature management.
Implementation Method 1
supplying a plasma generating gas into the treatment container and maintaining inside of the treatment container at a pressure lower than atmospheric pressure
Implementation Method 2
supplying a plasma generating gas into the treatment container and maintaining inside of the treatment container at a pressure lower than atmospheric pressure
Implementation Method 3
rotating the treatment container about a central axis of the treatment container as a rotation axis in a state in which the rotation axis of the treatment container is inclined with respect to horizontal
Implementation Method 4
cooling one or both of the treatment container and the electrode during the plasma treatment
Data Source
AI summary
Provided is a hexagonal boron nitride powder that can achieve higher thermal conductivity when added as a filler to resin. A plasma treatment method of plasma-treating a hexagonal boron nitride powder under reduced pressure comprises: storing the hexagonal boron nitride powder in a treatment container; supplying a plasma generating gas into the treatment container and maintaining inside of the treatment container at a pressure lower than atmospheric pressure; applying high frequency waves to an electrode installed outside the treatment container while rotating the treatment container about a central axis of the treatment container as a rotation axis in a state in which the rotation axis of the treatment container is inclined with respect to horizontal, to plasma-treat the hexagonal boron nitride powder in the treatment container; and cooling one or both of the treatment container and the electrode during the plasma treatment.