Plasma Treatment Method for Surface Modification

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Solution Overview

Problem

Current methods for modifying the hydrophilic or hydrophobic properties of non-conductor surfaces are time-consuming, hazardous, and lack selectivity, particularly in electroless plating processes, where catalysts like Sn-Pd colloid do not adhere well to hydrophobic surfaces and require dangerous chemical treatments, and existing plasma treatments are inefficient in energy use and surface patterning.

Innovation Solution

A plasma treatment method using coplanar dielectric barrier discharge to generate a planar plasma, with an optical observation system to determine the effective influence region, allowing for selective and efficient modification of surface properties without immersing the substrate fully in plasma, enabling patterning and reducing energy consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If strong acid or high-temperature caustic soda treatment is used to modify substrate surface, then hydrophilic property is achieved, but the process becomes time-consuming and hazardous

Engineering Contradiction:
Improvehydrophilic propertyVSAvoidprocess time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention changes the fundamental parameters of the treatment process by using plasma at room temperature instead of high-temperature chemical solutions. The plasma treatment modifies surface energy and hydrophilicity through controlled exposure to reactive species, achieving the desired surface property without the time-consuming and hazardous chemical processes.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the mechanical/chemical system (acid or base solutions requiring heating and soaking) with a plasma-based system. The plasma generator creates reactive species that directly interact with the substrate surface, eliminating the need for hazardous chemicals and high-temperature processing while reducing treatment time.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If plasma treatment is performed in a large reaction chamber, then surface modification is achieved, but energy consumption increases due to long pumping time

Engineering Contradiction:
Improvesurface modificationVSAvoidenergy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The invention segments the plasma treatment process by using a localized plasma generator that creates plasma only at the substrate surface rather than filling a large chamber. This eliminates the need to pump down large volumes of gas, significantly reducing energy consumption while maintaining effective surface modification through direct plasma-surface interaction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention extracts the plasma generation function from a large chamber environment and concentrates it at the substrate surface through a portable plasma generator. This allows surface modification to occur in atmospheric conditions without requiring vacuum pumping infrastructure, thereby eliminating the energy-intensive pumping process.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If plasma directly bombards the treated surface, then modification is achieved, but etching or undesired roughening occurs

Engineering Contradiction:
Improvesurface modificationVSAvoidsurface integrity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The invention introduces dynamics by allowing the substrate to move through the plasma field or the plasma generator to scan across the substrate surface. This controlled interaction ensures uniform modification without excessive localized energy concentration that would cause etching or roughening, maintaining surface integrity while achieving the desired modification.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention uses periodic or pulsed plasma application rather than continuous bombardment. By controlling the plasma generation in pulses or moving the treatment zone periodically across the substrate, the treatment achieves uniform modification without accumulating excessive energy that would lead to etching or surface damage.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for rapid and effective modification of hydrophilicity and hydrophobicity on non-conductor surfaces at room temperature, enabling precise patterning and reducing the need for hazardous chemicals, while optimizing plasma energy use.

Implementation Method 1

generating a planar plasma in a plasma treatment chamber

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

coplanar dielectric barrier discharge

Methodology Applied
Scientific EffectDielectric barrier discharge:

Implementation Method 3

a fluorescent coating located on a surface of the transparent substrate

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS11373847B2Plasma treatment method
Publication Date: 2022.06.28 IND TECH RES INST
  • US11373847B2 patent drawing
  • US11373847B2 patent drawing
  • US11373847B2 patent drawing

AI summary

A plasma treatment method is provided. The method includes generating a planar plasma in a plasma treatment chamber, observing an effective influence region of the planar plasma by using an optical observation system in which an observation lens has a transparent substrate and a fluorescent coating thereon, adjusting a location of the observation lens to observe a brightness change of the fluorescent coating and the transparent substrate to obtain a location and a thickness range of the effective influence region of the planar plasma, and then adjusting a location of the observation lens to observe a brightness change of the fluorescent coating and the transparent substrate to obtain a location and a thickness range of the effective influence region of the planar plasma. A location of a sample is adjusted to within the effective influence region, and a plasma treatment is then performed on the sample.