Plasma Chamber Cooling Plate for Window Cooling Without Signal Loss
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Solution Overview
Problem
Existing cooling methods for plasma processing windows in semiconductor manufacturing cause distortion in electromagnetic wave signals and reduce energy transmission efficiency due to the need for air injection across the entire window area.
Innovation Solution
A cooling plate design that uses a combination of a circular inner plate and a ring-shaped outer plate with strategically placed inlets and outlets, employing the Coanda effect to induce gas flow along the window surface, reducing the covered area while ensuring uniform airflow and maintaining temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If air is injected into a plate covering the entire region of the window, then the window can be cooled effectively, but distortion occurs in transmission of electromagnetic wave signals and energy transmission efficiency deteriorates
Solution Approach 1:
The cooling plate is divided into a circular plate-shaped body covering the center region and a ring-shaped body covering the edge region, with the ring-shaped body having a larger radial extension. This segmentation allows selective cooling of different window regions while minimizing the total covered area, thereby reducing electromagnetic wave distortion and energy loss.
Solution Approach 2:
Different regions of the window are cooled with different priorities - the center region (circular body) and edge region (ring-shaped body) have different cooling configurations. The ring-shaped body extends further radially to cool the edge region where thermal loads differ from the center, optimizing cooling effectiveness while minimizing overall plate area.
2Temperature
If the cooling plate covers a larger area of the window, then cooling effectiveness is improved, but distortion of electromagnetic signals increases
Solution Approach 1:
The cooling plate is segmented into a circular body for center region cooling and a ring-shaped body for edge region cooling. This segmentation allows the cooling function to be distributed across different geometric shapes that collectively cover necessary areas while minimizing total material presence, thus reducing electromagnetic wave distortion.
Solution Approach 2:
The cooling plate employs curved geometries - a circular plate shape for the center region and a ring shape for the edge region - rather than flat or rectangular configurations. These curved shapes better conform to the window geometry and electromagnetic field distribution, providing effective cooling while minimizing signal distortion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances airflow across the entire window region, maintaining temperature stability without distorting electromagnetic signals, thus improving energy transmission efficiency and plasma distribution.
Implementation Method 1
the curved surface may be formed such that the gas may be induced to an upper surface of the window disposed below the bottom surface of the body by the Coanda effect while flowing along the curved surface from the inlet
Data Source
AI summary
A cooling plate and a plasma processing chamber are proposed. The cooling plate is configured to allow air to flow throughout the entire region of a window while reducing a region of covering the window. The cooling plate is configured to cool a window configured to seal a plasma processing space at an upper portion, and the cooling plate includes a body having a circular plate shape covering a part of a center region of the window, an inlet through which a gas is introduced into the body, and an outlet through which the gas is discharged from the body to the window. A flow path through which the gas flows and a slope formed from the flow path toward the window are formed between the inlet and the outlet.