Plasmon Heating for Multi-Directional MR Sensor Pinning

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Solution Overview

Problem

Conventional magnetic recording sensors face challenges in achieving multi-directional anti-ferromagnetic pinning due to poor light absorption efficiency of materials, requiring high laser power or complex optics for selective heating during fabrication.

Innovation Solution

The use of patterned plasmon antenna materials like Au, Ag, or Cu to enhance optical absorption and selective heating of anti-ferromagnetic layers, allowing for multi-directional pinning of magnetization directions on a single wafer using lower power light sources and simpler optics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If conventional materials are used for MR sensor fabrication, then the fabrication process is simple, but the light absorption efficiency is poor requiring high laser power

Engineering Contradiction:
Improvelight absorption efficiencyVSAvoidlaser power
Core Design Contradiction:
Use of energy by moving objectVSPower

Solution Approach 1:

A plasmon generating layer is introduced as an intermediary component between the incident light and the AFM layer. This layer absorbs optical energy and generates plasmons that decay into thermal electrons, which then heat the AFM material. This intermediary mechanism enables efficient energy transfer from light to the target material without requiring high direct laser power.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical and chemical parameters of the sensor structure by adding a plasmon generating layer with specific optical properties. This layer has high optical absorption cross-section and appropriate plasmon resonance characteristics, transforming the overall optical response of the sensor stack to achieve efficient light absorption at lower power levels.

Inventive Principle:
Principle #35Parameter changes

2Temperature

If high laser power is used for selective heating, then sufficient heating of AFM material is achieved, but the fabrication complexity and cost increase

Engineering Contradiction:
ImproveAFM material heating temperatureVSAvoidoptics complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The plasmon generating layer acts as a mediator that converts optical energy into thermal energy through plasmon excitation and decay. This process occurs within the sensor structure itself, eliminating the need for complex external heating apparatus and high-power laser systems, thereby reducing fabrication complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The sensor structure itself provides the heating mechanism through its integrated plasmon generating layer. The layer automatically converts incident light into localized heat at the AFM interface through plasmon decay, making the system self-heating without requiring external thermal management systems or complex optics.

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If shadow mask method is used for multi-directional pinning, then different regions can be annealed with different field directions, but the manufacturing time increases

Engineering Contradiction:
Improvemulti-directional pinning capabilityVSAvoidwafer fabrication time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The plasmon generating layer is patterned with different geometries (size, shape, orientation) in different regions of the wafer. Each pattern is optimized to absorb light and generate plasmons with specific spatial and angular characteristics, enabling different magnetic field directions to be achieved in different regions simultaneously during a single illumination step.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The fabrication process uses periodic illumination with polarized light at different orientations. By sequentially illuminating the wafer with light polarized in different directions, different regions with corresponding plasmon layer patterns are activated to achieve multi-directional pinning. This periodic illumination approach is more efficient than continuous shadow masking.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables efficient and cost-effective production of MR sensors with varied pin directions by selectively heating specific regions, improving wafer throughput and reducing fabrication complexity.

Implementation Method 1

heating by the absorption of energy from optical frequency excited plasmons

Methodology Applied
Scientific EffectPlasmon heating: Absorption (EM radiation)

Implementation Method 2

improve and vary the optical absorption efficiency of magnetic materials

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Implementation Method 3

the sensor is heated above the blocking temperature of the AFM material so that the AFM layer changes from its AFM phase to a non-AFM phase

Methodology Applied
Scientific EffectPhase transition: Phase Change

Implementation Method 4

a significantly strong external magnetic field is applied to the sensor in the direction of the desired magnetization of the PL, so that the magnetization of all magnetic layers in the sensor stack are aligned in this strong field direction

Methodology Applied
Scientific EffectMagnetic alignment: Magnetic Field

Implementation Method 5

the sensor is cooled down to room temperature for the AFM layer to return to the AFM phase through lattice reordering

Methodology Applied
Scientific EffectLattice reordering: Crystallisation

Data Source

PatentUS9372241B2Multi-directional pin anneal of MR sensors with plasmon heating
Publication Date: 2016.06.21 HEADWAY TECHNOLOGIES INC
  • US9372241B2 patent drawing
  • US9372241B2 patent drawing
  • US9372241B2 patent drawing

AI summary

A method by which portions of a wafer level fabrication can be selectively heated by forming plasmon generating layers of specific size, shape, orientation and material on the fabrication and then illuminating the formation with electromagnetic radiation of such wavelength and polarization as will optimally be absorbed by the plasmon generating layers so as to generate plasmons therein. The generated plasmons thereupon produce thermal energy which is transferred to portions of the fabrication with which the plasmon generation layer has thermal contact. This method is particularly advantageous for producing multiple anneals and different magnetic pinning directions for the anti-ferromagnetic pinning layer in each of an array of GMR or TMR devices. In that process, the anti-ferromagnetic layer must be raised above its Curie temperature at which point it loses its anti-ferromagnetic properties and can have a magnetization imposed by application of an external magnetic field. The method can equally well be applied to any wafer level fabrication or deposited film fabrication in which it is desired to heat specific regions to obtain some specified result that is temperature dependent.