On-Chip Plasmonic Energy Harvester With Supercapacitor Buffering

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Solution Overview

Problem

Existing self-powered nano and microsystems for IoT applications face challenges with battery replacement interruptions and energy fluctuations from sources like solar or eolian energy, requiring stable energy harvesting solutions.

Innovation Solution

Integration of a plasmonic thin film solar cell based on interdigitated MSM Schottky barriers with chalcogenide semiconductors and a planar supercapacitor on the same chip, utilizing surface plasmon polaritons for enhanced light absorption and energy storage, along with a common electrode for the solar cell and supercapacitor, and a sensor powered by the supercapacitor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a battery is used as an energy source for portable instruments, then the system can operate continuously, but the system requires periodic battery replacement which causes operation interruption

Engineering Contradiction:
Improvecontinuous operationVSAvoidoperation interruption during battery replacement
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system uses an on-chip solar cell to harvest energy from the environment and a supercapacitor to store it, enabling the system to power itself without external battery replacement. The solar cell continuously charges the supercapacitor, which in turn powers the sensor and electronics, creating a self-sustaining energy system that eliminates operational interruptions.

Inventive Principle:
Principle #25Self-service

2Reliability

If on-chip energy harvesting devices are used to replace batteries, then battery replacement interruptions are eliminated, but the energy source fluctuates (e.g., solar or eolian energy)

Engineering Contradiction:
Improvecontinuous operation without battery replacementVSAvoidenergy source fluctuation
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The supercapacitor acts as an intermediary energy storage device between the fluctuating solar cell output and the sensor power requirements. It accumulates energy during periods of high generation and releases it during periods of low generation, smoothing out the fluctuations and providing stable power to the sensor and electronics.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If supercapacitors are used to store energy from fluctuating sources, then stable energy delivery is achieved, but the energy density is lower than that of batteries

Engineering Contradiction:
Improvestabilized energy deliveryVSAvoidenergy density
Core Design Contradiction:
Stability of the object's compositionVSQuantity of substance

Solution Approach 1:

The system changes the operating parameters by using a solar cell with optimized surface area and efficiency to compensate for the lower energy density of the supercapacitor. By maximizing the energy harvesting rate from the solar cell, the system ensures that enough energy is captured to maintain operation despite the supercapacitor's lower storage capacity compared to batteries.

Inventive Principle:
Principle #35Parameter changes

4Use of energy by moving object

If plasmonic structures are added to enhance light absorption in solar cells, then quantum efficiency increases, but device complexity increases

Engineering Contradiction:
Improvequantum efficiency of solar cellVSAvoidstructure complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The solar cell electrodes are designed with an interdigitated pattern that serves dual functions: as electrical contacts for current collection and as plasmonic structures for enhancing light absorption. This merging of electrical and optical functions into a single structure achieves high quantum efficiency without adding separate plasmonic components, thereby avoiding increased device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides continuous operation with stable energy harvesting, increased light absorption and photocurrent, and efficient energy storage and delivery to sensors, addressing the limitations of battery-powered systems and energy fluctuations.

Implementation Method 1

enhanced light absorption and quantum efficiency by surface plasmon polariton resonances at that interface

Methodology Applied
Scientific EffectSurface plasmon polariton resonance: Resonance

Implementation Method 2

thin film solar cells based on interdigitated metal-semiconductor-metal (MSM) Schottky barriers with enhanced light absorption and quantum efficiency

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Implementation Method 3

on-chip planar interdigitated supercapacitors with electrodes based on the same chalcogenides materials

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentEP4300579A1On-chip integrated plasmonic energy harvester, microsupercapacitor and sensor, and fabrication method for the same
Publication Date: 2024.01.03 SC NANOM MEMS SRL
  • EP4300579A1 patent drawingFigure 1~2
  • EP4300579A1 patent drawingFigure 3
  • EP4300579A1 patent drawingFigure 4

AI summary

The present disclosure presents an innovative design and technology concept for an on-chip integrated self-powered nano and microsystem containing a plasmonic interdigitated metal-semiconductor-metal (SMS) Schottky thin film solar cell as energy harvester, an in-plane interdigitated supercapacitor as power source, and a sensor with interdigitated electrodes. The sensor can be an interdigitated plasmonic MSM hot electron Schottky photodetector, or an ultralow power chemiresistive gas sensor. The photoactive material of plasmonic solar cell and photodetector and the electroactive material of microsupercapacitor are based on the same chalcogenide semiconductor, like Sb2S3, and similar materials. The three modules of the self-powered on-chip integrated nano and microsystem are all connected in series and have a common electrode between the solar cell and supercapacitor and another one between the supercapacitor and the sensor. Novel design concepts for multiband, chirped wideband and, multi-polarization plasmonic solar cells and photodetectors are also disclosed here.