Plate Workpiece Transfer Nozzle Float Mechanism

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Solution Overview

Problem

Existing plate-shaped workpiece transfer mechanisms require increased man-hours for adjustments to prevent damage to the chuck table, as they need to account for the possibility of the holding portion colliding with the chuck table's surface.

Innovation Solution

A plate-shaped workpiece transfer apparatus with a holding unit that includes two holding members with a rod portion and a nozzle for discharging fluid to float the workpiece, and restriction pins to prevent horizontal displacement, allowing for precise positioning without manual adjustment of the holding members.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the holding portion is designed to engage the outer edge of the plate-shaped workpiece, then the workpiece can be transferred without vacuum adhesion, but the holding portion may collide with the chuck table surface causing damage

Engineering Contradiction:

Improveworkpiece transfer reliabilityVSAvoidchuck table damage risk

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A fluid (gas or liquid) is introduced as an intermediary between the holding portion and the chuck table surface. The fluid generates upward pressure on the workpiece, preventing the holding portion from contacting and damaging the chuck table surface during transfer operations.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention utilizes pneumatic or hydraulic pressure by discharging fluid through nozzles positioned between the holding portion and the chuck table. This fluid pressure creates a cushioning effect that prevents direct contact between the holding portion and the chuck table, eliminating damage risk.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Reliability

If the holding portion position is adjusted to prevent collision with the chuck table, then damage risk is reduced, but the number of man-hours required for adjustment increases

Engineering Contradiction:

Improvechuck table protectionVSAvoidadjustment time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The system automatically maintains the appropriate spacing between the holding portion and chuck table through fluid pressure control. The fluid pressure self-regulates to prevent contact, eliminating the need for manual adjustment and positioning of the holding portion to prevent collision.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Fluid is discharged in advance before the holding portion approaches the chuck table surface. This preliminary action creates a protective fluid cushion that prevents collision before it can occur, eliminating the need for subsequent manual adjustments to prevent damage.

Inventive Principle:

Principle #10Preliminary action

3Ease of operation

If fluid is discharged from the nozzle portion, then the plate-shaped workpiece floats from the holding surface, but the rod portion may tilt causing misalignment

Engineering Contradiction:

Improveworkpiece release easeVSAvoidholding member alignment

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The rod portion is allowed to tilt slightly and oscillate when fluid is discharged. This controlled vibration or oscillation helps the rod portion self-align and maintain parallelism with the chuck table surface during the workpiece floating process, preventing misalignment.

Inventive Principle:

Principle #18Mechanical vibration

Solution Approach 2:

The system changes the physical state and pressure parameters of the discharged fluid to control the floating behavior. By adjusting fluid pressure and flow characteristics, the rod portion maintains proper alignment while the workpiece floats, preventing misalignment issues.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces the risk of damage to the apparatus by automatically adjusting the holding members and restriction pins to maintain the workpiece's position, eliminating the need for increased man-hours in adjustments.

Implementation Method 1

a nozzle portion for discharging a fluid from the lower surface of the rod portion toward the holding surface to thereby float the plate-shaped workpiece from the holding surface

Methodology Applied

Scientific EffectFluid pressure: Pressure Increase

Data Source

PatentUS10040204B2Plate-shaped workpiece transfer apparatus and processing apparatus

Publication Date: 2018.08.07 DISCO CORP

AI summary

Apparatus transfers a plate-shaped workpiece to/from a holding surface of a chuck table. The apparatus includes a holding unit and a moving mechanism. The holding unit includes at least two holding members for holding the outer edge of the workpiece, a support plate for supporting the holding members so as to allow movement of the holding members toward or away from the outer edge of the workpiece, and a moving unit for moving the holding members. Each holding member includes a rod portion vertically movably extending downward through the support plate, an engaging portion formed on the outer circumference of the rod portion at the lower end thereof for engaging the outer edge of the workpiece, and a nozzle portion for discharging a fluid from the lower surface of the rod portion toward the holding surface to thereby float the workpiece from the holding surface.