Plating Apparatus Frame Alignment and Field Shielding
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Solution Overview
Problem
The existing electroplating apparatuses face challenges in maintaining accurate alignment of the anode, substrate, and regulation plate due to deformation caused by the weight of the holders, leading to non-uniform metal film thickness and increased demand for enhanced positioning precision.
Innovation Solution
A plating apparatus with a frame that includes a support structure and a box structure to reinforce the positioning of the anode holder, substrate holder, and regulation plate, utilizing positioning protrusions and stoppers to ensure parallel alignment and precise positioning of the components, with the box structure capable of blocking electric fields to prevent leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a positioning holder is provided to hold upper portions of the anode holder, substrate holder and regulation plate, then the alignment of anode, substrate and regulation plate can be improved, but the positioning holder deforms due to the weights of the holders causing the centers to be out of alignment
Solution Approach 1:
The positioning holder is divided into multiple independent positioning units, each responsible for positioning one component (anode holder, substrate holder, or regulation plate). This segmentation allows each unit to be optimized independently and reduces the cumulative deformation effect on overall alignment.
Solution Approach 2:
The positioning holder employs an asymmetric structural design where components are positioned at strategically optimized locations rather than symmetric distribution. This asymmetric arrangement minimizes the deformation caused by gravitational loads while maintaining precise alignment of the centers of anode, substrate, and regulation plate.
2Reliability
If the anode holder, substrate holder and regulation plate are made heavy to provide stability, then the positioning accuracy can be improved, but the positioning holder deforms due to the weights
Solution Approach 1:
The positioning holder incorporates counterweight structures and balanced support mechanisms that offset the gravitational effects of heavy holders. By strategically placing counterweights and optimizing the support geometry, the system maintains positioning stability without causing deformation that would compromise alignment precision.
Solution Approach 2:
The design transitions from a simple planar support structure to a three-dimensional framework with multiple support levels and distributed load paths. This dimensional enhancement allows the structure to bear heavy loads while maintaining precise positioning through spatial distribution of forces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures stable and accurate alignment of the anode, substrate, and regulation plate, resulting in improved uniformity of the metal film thickness and enhanced precision in electroplating processes.
Implementation Method 1
a box structure fixed to the support; an upper positioning structure for fixing a relative position between the support and the upper portions of the anode holder, the substrate holder and the regulation plate; and a lower positioning structure for fixing a relative position between the box structure and lower portions of the anode holder, the substrate holder and the regulation plate
Data Source
AI summary
There is disclosed a plating apparatus which can dispose an anode, a substrate and a regulation plate parallel to each other in such a manner that the center of the anode, the center of the substrate and the center of an opening of the regulation plate are aligned in a straight line. A frame of the plating apparatus includes: a support for supporting upper portions of an anode holder, a substrate holder and the regulation plate; a box structure secured to the support; an upper positioning structure for fixing a relative position between the support and the upper portions of the anode holder, the substrate holder and the regulation plate; and a lower positioning structure for fixing a relative position between the box structure and lower portions of the anode holder, the substrate holder and the regulation plate.