Plating Apparatus Membrane Deformation Control via Anode Liquid Circulation
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Solution Overview
Problem
The maintenance of cup type plating apparatuses often results in deformation of the membrane within the plating tank due to uneven pressure increases in the anode and cathode chambers during the circulation of plating liquids.
Innovation Solution
The method involves starting the circulation of anode liquid before cathode liquid, ensuring the anode liquid level is maintained above a predetermined level, and adjusting temperatures within a predetermined range to minimize membrane deformation by controlling pressure differentials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the cathode liquid circulation is started before the anode liquid circulation during maintenance, then the cathode chamber pressure increases first, but the membrane deforms downward due to unbalanced pressure
Solution Approach 1:
The patent applies preliminary action by starting the anode liquid circulation before the cathode liquid circulation during maintenance. This sequential approach ensures that the anode chamber pressure increases first, providing counter-pressure to prevent downward membrane deformation when the cathode chamber pressure subsequently increases. The control device coordinates this timing to maintain membrane integrity while performing maintenance operations.
2Productivity
If both anode and cathode liquids are circulated simultaneously during maintenance, then maintenance is performed efficiently, but pressure imbalance causes membrane deformation
Solution Approach 1:
The patent implements preliminary action by establishing a specific sequence where anode liquid circulation is started before cathode liquid circulation. This temporal separation prevents simultaneous pressure increases that would cause membrane deformation, while still maintaining efficient maintenance operations. The control device manages this sequencing to balance productivity and membrane stability.
3Productivity
If the circulation flow rate is increased to perform maintenance faster, then productivity improves, but pressure increase becomes more rapid causing greater membrane deformation
Solution Approach 1:
The patent applies preliminary action by increasing the anode liquid circulation flow rate before starting cathode liquid circulation. This preparatory step builds counter-pressure in the anode chamber in advance, enabling the system to withstand higher cathode chamber pressures without excessive membrane deformation. The control device coordinates this flow rate sequencing to maximize maintenance speed while protecting the membrane.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses membrane deformation by managing pressure increases in the anode chamber before the cathode chamber, ensuring stable operation and reducing gas bubbles in the cathode liquid.
Implementation Method 1
a pressure increase in the anode chamber can be started before a pressure increase in the cathode chamber
Data Source
AI summary
Provided is a technique that allows suppressing a deformation of a membrane arranged in an inside of a plating tank.A maintenance method of plating apparatus includes circulating an anode liquid between an anode liquid tank and an anode chamber after having returned the anode liquid in the anode chamber to the anode liquid tank (step S10e), and circulating a cathode liquid between a cathode liquid tank and a cathode chamber after having returned the cathode liquid in the cathode chamber to the cathode liquid tank and after the circulation of the anode liquid between the anode liquid tank and the anode chamber is started (step S10f).