Pneumatic Vibration Isolation Control for Damping-Force Trade-Offs

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Solution Overview

Problem

Existing vibration isolators for semiconductor devices face challenges in achieving high acceleration and vibration damping control with high accuracy, as conventional methods like linear motors and pneumatic servos face limitations in generated force, responsiveness, air consumption, and cost, leading to a trade-off between vibration damping and isolation performance.

Innovation Solution

The vibration isolator is configured with independently arranged vibration isolation and damping actuators, utilizing a gas pressure method with a vibration damping valve that performs gas intake and exhaust, allowing for high acceleration and damping control without increasing average air consumption, and incorporating a non-linear characteristic correction mechanism to enhance responsiveness and accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If conventional pneumatic servos are used for vibration damping control, then vibration damping force can be generated, but air consumption increases and responsiveness deteriorates

Engineering Contradiction:

Improvevibration damping forceVSAvoidair consumption

Core Design Contradiction:

ForceVSUse of energy by moving object

Solution Approach 1:

The vibration isolation device is divided into two independent systems: vibration isolation actuators and vibration damping actuators. Each system has its own dedicated servo valve. The vibration damping actuator uses a separate servo valve that allows large flow rates only during vibration damping control, while the vibration isolation servo valve maintains fine control capability. This segmentation resolves the contradiction by allowing high air consumption only when vibration damping is needed, not during normal isolation operations.

Inventive Principle:

Principle #1Segmentation

2Speed

If servo valve flow rate is increased to improve vibration damping performance, then vibration damping responsiveness improves, but vibration isolation performance deteriorates

Engineering Contradiction:

Improvevibration damping responsivenessVSAvoidvibration isolation performance

Core Design Contradiction:

SpeedVSMeasurement precision

Solution Approach 1:

The system separates vibration isolation and vibration damping functions into independent actuators with dedicated servo valves. The vibration damping servo valve can be optimized for high flow rate and fast response without compromising the vibration isolation servo valve's fine control characteristics. This allows each subsystem to be optimized for its specific function without the trade-off that would exist in a unified system.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system dynamically switches between vibration isolation mode and vibration damping mode based on operational requirements. During acceleration/deceleration phases when vibration damping is needed, the damping actuator activates with its dedicated high-flow servo valve. During normal operation, only the isolation system operates with its precision-optimized servo valve, maintaining fine control capability.

Inventive Principle:

Principle #15Dynamics

3Speed

If linear motors are used for vibration damping, then responsiveness is high, but generated force is limited

Engineering Contradiction:

ImproveresponsivenessVSAvoidgenerated force

Core Design Contradiction:

SpeedVSForce

Solution Approach 1:

The system merges the advantages of pneumatic actuators (high generated force) with the responsiveness requirements for vibration damping. By using pneumatic vibration damping actuators with dedicated servo valves, the system achieves both high force capability and fast response, resolving the limitation of linear motors that can respond quickly but generate limited force.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves high accuracy and high acceleration vibration damping control while maintaining optimal vibration isolation performance, reducing air consumption and costs, and overcoming the trade-off issues of conventional systems.

Implementation Method 1

the vibration damping actuator is configured with a gas pressure method of being driven by a vibration damping valve that performs intake and exhaust of gas inside the vibration damping actuator

Methodology Applied

Scientific EffectGas pressure method: Pressure Gradient

Data Source

PatentEP4667773A1Fluid control system, and control method

Publication Date: 2025.12.24 TOKKYOKIKI CORP

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AI summary

In a manufacturing process in which vibration damping control and vibration isolation control are alternately repeated, a vibration isolation actuator and a pneumatic vibration damping actuator are independently arranged so as to have generated force components in the same direction. By separately driving the vibration isolation actuator, the vibration damping actuator, and a vibration damping servo valve, it is possible to select a configuration that is released from a trade-off relationship between vibration isolation performance and vibration damping performance and that can achieve the best performance.