Pole Figure Measurement Overlap Elimination

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Solution Overview

Problem

Pole figure measurements using two-dimensional detectors face challenges in covering a wide range without overlapping angles, particularly around α = 90°, and require trial and error to measure the center of the pole figure efficiently.

Innovation Solution

A processing method that determines angles ω and χ to enable continuous pole figure measurement without overlapping, allowing the center to be measured by adjusting the rotation angles to ensure one end of the arc contacts α = 90°, reducing the number of φ scans and optimizing measurement conditions for efficient data collection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the measurement range of α is widened by setting ω to χ = 30° at the symmetrical arrangement of a half of the diffraction angle (2θ), then the number of χ steps is reduced and measuring time is shortened, but no measurement can be carried out around α = 90° in the pole figure

Engineering Contradiction:
Improvemeasuring timeVSAvoidmeasurement coverage
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The measurement process is divided into multiple φ scan measurements with different χ values. The system automatically segments the measurement range into multiple sections and performs sequential measurements, ensuring complete coverage including the α = 90° region while maintaining efficient measurement speed.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically adjusts the measurement conditions by automatically determining optimal χ values for each φ scan based on the desired measurement range. This dynamic adjustment allows the system to adapt to different measurement requirements and ensure complete coverage without manual intervention.

Inventive Principle:
Principle #15Dynamics

2Productivity

If a wide range of pole figures are measured at a time by tilting a sample, then the measuring time is reduced, but the center of the pole figure cannot be measured and blank in measurement is produced

Engineering Contradiction:
Improvemeasuring timeVSAvoidmeasurement completeness
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The system performs preliminary determination of measurement conditions, including automatic calculation of optimal χ values and measurement ranges for each φ scan. This preliminary planning ensures that the center of the pole figure is included in the measurement while avoiding blank regions, before the actual measurement begins.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses feedback mechanisms to automatically adjust measurement parameters based on the desired measurement range and sample characteristics. The automatic determination of measurement conditions incorporates feedback from the measurement requirements to ensure complete and accurate pole figure measurement.

Inventive Principle:
Principle #23Feedback

3Reliability

If conventional methods are used to resolve blank in measurement at the center of the pole figure, then trial and error is required, but this increases the burden on the user

Engineering Contradiction:
Improvemeasurement completenessVSAvoiduser burden
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The system performs self-service by automatically determining optimal measurement conditions including χ values and measurement ranges for each φ scan. The automatic calculation and optimization of measurement parameters eliminates the need for user trial and error, reducing operational burden while ensuring measurement completeness.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system automatically changes measurement parameters (χ values, measurement ranges) based on the desired measurement objectives. This automatic parameter optimization ensures that the measurement conditions are always appropriate for capturing the complete pole figure including the center region, without requiring user intervention.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and accurate pole figure measurements by ensuring continuous data collection without overlapping angles, allowing the center to be measured and reducing user burden through automated condition setting and visualization of measurement ranges.

Implementation Method 1

processing method for determining conditions of pole figure measurement by X-ray diffraction

Methodology Applied
Scientific EffectX-ray diffraction: X-Ray

Implementation Method 2

measuring the intensity with the χ step and the φ scan

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentEP3260850B1Processing method, processing apparatus and processing program
Publication Date: 2022.01.26 RIGAKU CORP
  • EP3260850B1 patent drawingFigure 1
  • EP3260850B1 patent drawingFigure 2
  • EP3260850B1 patent drawingFigure 3A

AI summary

Provided are a processing method, a processing apparatus and a processing program which can perform pole figure measurement continuously without overlapping of an angle α in a pole figure with the small number of times of φ scan, thereby enabling the efficient measurement. The processing method for determining conditions of pole figure measurement by X-ray diffraction, includes the steps of: receiving input of a diffraction angle 2θ; and determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each φ scan for a rotation angle φ within a sample plane so as to make a range of an angle α continuous from α = 90° to α = 0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the input angle 2θ, in which determining the angle ω and the angle χ is repeated.