Polishing Pad Temperature Control via Gravity-Contact Heat Conductor
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Solution Overview
Problem
In polishing devices, rigidly fixed heat conductors can obstruct the flow of polishing liquids on the polishing pad, leading to reduced in-plane uniformity of the polishing rate.
Innovation Solution
A temperature adjusting device with a heat conductor that uses its own weight to contact the polishing pad, aided by column members and overhung members to prevent excessive force and maintain position, allowing for uniform polishing fluid flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the heat conductor is rigidly fixed to the arm, then the heat conductor can be stably positioned, but the heat conductor pushes against the polishing pad with excessive force, obstructing polishing liquid flow and reducing in-plane uniformity of polishing rate
Solution Approach 1:
The heat conductor is designed with a movable connection to the arm through overhung members that can contact the arm's top face. This dynamic structure allows the heat conductor to move freely in the vertical direction, contacting the polishing pad only with its own weight rather than being rigidly pushed by the arm, thus preventing obstruction of polishing liquid flow while maintaining positional stability through gravitational force.
2Reliability
If the arm applies force to bring the heat conductor into contact with the polishing pad, then contact is ensured, but excessive force obstructs polishing liquid flow
Solution Approach 1:
The heat conductor utilizes its own weight to achieve contact with the polishing pad without requiring the arm to apply additional force. The overhung members allow the heat conductor to hang freely and contact the pad surface naturally under gravity, ensuring reliable contact while avoiding excessive force that would obstruct polishing liquid flow.
3Ease of operation
If the heat conductor is lifted by moving the arm upward, then the heat conductor can be separated from the polishing pad, but rigid fixation requires excessive force to lift
Solution Approach 1:
The movable connection through overhung members allows the heat conductor to be freely lifted by simply moving the arm upward without rigid constraints. The heat conductor separates from the polishing pad easily when the arm rises, as it is not rigidly fixed but rather hangs from the overhung members, significantly reducing the force required for lifting compared to rigid fixation.
Data Source
AI summary
An object of the present invention is to improve in-plane uniformity in polishing in a polishing device.A temperature adjusting device for adjusting temperature of a rotating polishing pad comprises: a heat conductor that can contact with a top face of the polishing pad; an arm for holding the heat conductor above the polishing pad; column members formed to stand on a top face of the heat conductor, comprising an upstream-side column member and a downstream-side column member arranged at a position at an upstream/downstream side of rotation of the polishing pad; and overhung members extending, from the upstream-side column member and the downstream-side column member, in directions that are parallel to the top face of the heat conductor; wherein the overhung members can contact with a top face of the arm.