Polymer Adhesive Composition for High-Temperature Semiconductor Processing

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Solution Overview

Problem

Conventional film adhesives used in semiconductor processing fail to provide sufficient adhesive strength and heat resistance in high-temperature environments, leading to poor adhesion and gas generation, which complicates high-temperature and high-vacuum processing steps such as through-hole electrode formation.

Innovation Solution

A polymer-based adhesive composition is developed with a low-molecular-weight component content of less than 0.3 weight % and a weight-average molecular weight between 10,000 and 300,000, incorporating monomers like styrene, (meth)acrylic acid esters, and N-alkylmaleimides, which improves heat resistance and crack resistance while minimizing gas generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional film adhesives are used in high-temperature processing, then adhesion is maintained at room temperature, but adhesive strength deteriorates and gas is generated at high temperatures

Engineering Contradiction:
Improveadhesive strengthVSAvoidgas generation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the chemical composition parameters of the adhesive by using specific monomers (styrene, (meth)acrylic acid esters, N-alkylmaleimides) with controlled polymerization to create a polymer with weight-average molecular weight between 10,000 and 300,000 and low-molecular-weight component content of 0.01-0.3 weight %. This parameter optimization enables the adhesive to maintain strength at high temperatures without gas generation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite adhesive system by combining multiple monomers with different functional groups (styrene for thermal stability, (meth)acrylic acid esters for adhesion, N-alkylmaleimides for heat resistance) to form a copolymer with superior high-temperature performance and minimal gas generation.

Inventive Principle:
Principle #40Composite materials

2Temperature

If the polymer has high molecular weight to improve heat resistance, then heat resistance is improved, but crack resistance deteriorates

Engineering Contradiction:
Improveheat resistanceVSAvoidcrack resistance
Core Design Contradiction:
TemperatureVSStrength

Solution Approach 1:

The patent optimizes the molecular weight parameter by controlling polymerization to achieve a weight-average molecular weight between 10,000 and 300,000, and limits low-molecular-weight component content to 0.01-0.3 weight %. This precise parameter control balances heat resistance and crack resistance, preventing both excessive rigidity and insufficient thermal stability.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If low-molecular-weight component content is increased to improve processability, then ease of application is improved, but adhesive strength and heat resistance deteriorate

Engineering Contradiction:
ImproveprocessabilityVSAvoidadhesive strength
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent sets the low-molecular-weight component content within a narrow range of 0.01-0.3 weight %, which is sufficient for maintaining processability while avoiding the negative effects of excessive low-molecular-weight components on adhesive strength and heat resistance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesive composition exhibits strong adhesion and heat resistance up to 200°C, reducing gas generation and crack formation, making it suitable for high-temperature and high-vacuum semiconductor processing applications.

Implementation Method 1

a polymer prepared by polymerizing a monomer composition containing a polymerizable group

Methodology Applied
Scientific EffectPolymerization: Photopolymerisation

Implementation Method 2

exhibits strong adhesion and heat resistance up to 200°C

Methodology Applied
Scientific EffectThermal stability:

Implementation Method 3

a film adhesive for processing is attached on the circuit pattern surface

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS8877884B2Adhesive composition, film adhesive, and method for producing the adhesive composition
Publication Date: 2014.11.04 TOKYO OHKA KOGYO CO LTD

AI summary

An adhesive composition is disclosed which includes a polymer prepared by copolymerizing a monomer containing a polymerizable group, the polymer including a low-molecular-weight component having a molecular weight equivalent to 1% or less of the weight-average molecular weight of the polymer, the low-molecular-weight component is contained in a range of not less than 0 weight % to less than 0.3 weight % of the total weight of the polymer. This allows provision of an adhesive composition having great adhesive strength in a high-temperature environment, especially at temperatures from 140° C. to 200° C., as well as high heat resistance and favorable crack resistance.