Polymer Microcavity Arrays Mold Fabrication

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Solution Overview

Problem

Current microcavity plasma devices face limitations in cost-effective large-scale production due to restrictive fabrication techniques, such as laser ablation and mechanical drilling, which are time-consuming and lack dimensional control, and silicon substrates are not suitable for applications requiring transparency and lateral light propagation.

Innovation Solution

A method involving a mold with a negative volume impression of microcavities and microchannels is used to form microplasma devices within a polymer layer, allowing for rapid, accurate, and cost-effective production of large arrays on either rigid or flexible substrates, with the option of transparent polymer materials and electrodes for improved light transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If laser ablation or mechanical drilling is used to form microcavities, then microcavities can be formed, but the size is limited to about 50 μm and smaller sizes are difficult to make, and the cross-sections are not completely uniform

Engineering Contradiction:
Improvemicrocavity dimensional control and uniformityVSAvoidmicrocavity size control
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent uses a mold with a negative volume impression of the desired microcavity shape to replicate microcavities in a polymer layer. This copying approach allows precise reproduction of the microcavity geometry, achieving uniform cross-sections and accurate dimensional control that cannot be obtained through laser ablation or mechanical drilling.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent replaces the mechanical drilling or laser ablation process with a molding process where a mold is pressed into a polymer layer to form microcavities. This substitution enables better dimensional control and uniformity by using the precise geometry of the mold cavity rather than relying on mechanical removal processes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If laser ablation or mechanical drilling is used to form microcavities, then microcavities can be formed, but the processing time is prohibitive for large arrays

Engineering Contradiction:
Improvefabrication process simplicityVSAvoidproduction rate of microcavity arrays
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent creates a mold with the negative volume impression of microcavities beforehand. This preliminary action allows multiple microcavities to be formed simultaneously by pressing the mold into the polymer layer, rather than forming each microcavity individually through time-consuming drilling or ablation processes.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent combines multiple microcavity formation operations into a single molding step. By pressing the mold into the polymer layer once, numerous microcavities are formed simultaneously, dramatically increasing productivity compared to sequential drilling or ablation of each microcavity.

Inventive Principle:
Principle #5Merging (Combining)

3Ease of manufacture

If silicon substrates are used, then microcavity plasma devices can be fabricated, but the substrates are optically opaque and not suitable for applications requiring lateral propagation or coupling of visible light

Engineering Contradiction:
Improvefabrication convenienceVSAvoidlight transmission
Core Design Contradiction:
Ease of manufactureVSIllumination intensity

Solution Approach 1:

The patent changes the material parameter of the substrate from opaque silicon to transparent polymer materials. This parameter change allows visible light to propagate laterally through the substrate and enables coupling of light between microcavity plasma devices, while still allowing fabrication of microcavities through the molding process.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses polymer materials that can be transparent in the visible range, combining the benefits of ease of fabrication with optical transparency. The polymer substrate serves both as a structural support and as an optically transparent medium for light propagation.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the low-cost manufacturing of large microcavity plasma device arrays with precise replication, enabling higher spatial resolution and efficiency in light conversion, suitable for display and biomedical applications, and allows for the production of transparent devices suitable for applications like heads-up displays.

Implementation Method 1

A method of forming a microplasma device includes placing a curable polymer material between a mold having a negative volume impression of microcavities and/or microchannels and a substrate, curing the polymer

Methodology Applied
Scientific EffectUV curing: Photopolymerisation

Data Source

PatentUS8864542B2Polymer microcavity and microchannel device and array fabrication method
Publication Date: 2014.10.21 THE BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS
  • US8864542B2 patent drawing
  • US8864542B2 patent drawing
  • US8864542B2 patent drawing

AI summary

A method of forming a microplasma device places a curable polymer material between a mold having a negative volume impression of microcavities and/or microchannels and a substrate. The polymer is cured and then the mold is separated from the solid polymer. The method can form a microplasma device that includes a substrate and either or both of a microchannel or microcavity defined in a polymer layer supported by the substrate. Electrodes arranged with respect to the polymer material can excite plasma in a discharge medium contained in the microchannel or the microcavity or both. A flexible mold is preferably used to fabricate transparent polymer microcavities onto rigid substrates. A rigid mold is preferably used to fabricate transparent polymer microcavities onto flexible substrates. Having one of the mold and the substrate flexible and the other rigid aids in the separation of the mold from the cured polymer.