Polyurethane Polishing Pad Composition for CMP Trade-Off
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Solution Overview
Problem
Chemical mechanical polishing (CMP) pads face a trade-off between pad life and removal rate, with soft pads having prolonged life but poor removal rates and hard pads having high removal rates but short lives, necessitating a balance for improved performance.
Innovation Solution
A polyurethane polishing pad composition comprising 15-25 wt% 4,4′-methylene-bis(2-chloroaniline), 25-45 wt% isocyanates, 15-45 wt% polyols, 5-35 wt% ethylene oxide propylene oxide copolyol (EOPO), and 1-5 wt% additives, resulting in a hardness of 40-70 shore D, elongation of 200-400%, density of 0.7-0.9 g/cc, modulus of 25000-40000 kg/cm2, and tensile stress of 120-320 kg/cm2, which balances wear rate and removal efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If a soft polishing pad is used, then pad life is prolonged, but removal rate deteriorates
Solution Approach 1:
The patent applies parameter changes by precisely controlling the composition ratios of isocyanates (25-45 wt%), polyols (15-45 wt%), and EOPO (5-35 wt%), along with curing conditions, to achieve a specific hardness range (40-70 shore D) that simultaneously provides prolonged pad life and high removal rate
Solution Approach 2:
The patent uses composite materials by combining multiple polyol types (polyether polyol, polyester polyol), isocyanates, and EOPO in specific proportions to create a polyurethane foam with optimized mechanical properties that balance durability and polishing performance
2Productivity
If a hard polishing pad is used, then removal rate is improved, but pad life deteriorates
Solution Approach 1:
The patent applies parameter changes by precisely controlling the composition ratios of isocyanates (25-45 wt%), polyols (15-45 wt%), and EOPO (5-35 wt%), along with curing conditions, to achieve a specific hardness range (40-70 shore D) that simultaneously provides prolonged pad life and high removal rate
Solution Approach 2:
The patent uses composite materials by combining multiple polyol types (polyether polyol, polyester polyol), isocyanates, and EOPO in specific proportions to create a polyurethane foam with optimized mechanical properties that balance durability and polishing performance
3Stability of the object's composition
If elongation is increased, then pad flexibility is improved, but structural stability deteriorates
Solution Approach 1:
The patent applies parameter changes by optimizing the NCO index (100-200) and composition ratios to achieve elongation within 200-400% while maintaining structural stability through controlled cross-linking density and foam cell structure
Solution Approach 2:
The patent uses composite materials by combining polyether polyol (providing flexibility and elongation), polyester polyol (providing structural strength), and EOPO (modulating mechanical properties) to achieve both high elongation and structural stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polyurethane polishing pad achieves a high removal rate while extending pad life through its unique mechanical properties, optimizing CMP performance.
Implementation Method 1
a composition for manufacturing a polyurethane polishing pad is provided. The composition includes 15 to 25 wt % of MBCA, 25 to 45 wt % of isocyanates, 15 to 45 wt % of polyols, 5 to 35 wt % of ethylene oxide propylene oxide copolyol (EOPO)
Implementation Method 2
the composition is heated to cure and produce a polyurethane resin foam
Data Source
AI summary
The present disclosure provides a composition for manufacturing a polyurethane polishing pad. The composition includes 15 to 25 wt % of MBCA, 25 to 45 wt % of isocyanates, 15 to 45 wt % of polyols, 5 to 35 wt % of EOPO, and 1 to 5 wt % of additives. The polyurethane polishing pad made from the composition of the present disclosure has a hardness within a range of 40 to 70 shore D, an elongation within a range of 200 to 400%, a density within a range of 0.7 to 0.9 g/cc, a modulus within a range of 25000 to 40000 kg/cm2, and a tensile stress within a range of 120 to 320 kg/cm2.