Polyurethane Polishing Pads with Reactive Tertiary Amine
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Solution Overview
Problem
Polyurethane films used in polishing applications, such as Chemical Mechanical Planarization (CMP), face challenges in maintaining uniform thickness and feature dimensions due to viscosity changes during melt processing, which affects polishing performance and durability.
Innovation Solution
Incorporating reactive tertiary amine compounds in the synthesis of polyurethanes to improve viscosity stability, allowing for the production of polyurethane films with consistent thickness and feature dimensions, thereby enhancing the fabrication of polishing layers with precise topography.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If polyurethane films are used in polishing applications, then polishing performance is achieved, but viscosity changes during melt processing cause non-uniform thickness and feature dimensions
Solution Approach 1:
The patent modifies the chemical composition parameters of the polyurethane by incorporating reactive tertiary amine compounds (0.1-10 wt%) into the polymer structure. This chemical parameter change stabilizes the viscosity during melt processing, enabling uniform film thickness and precise feature dimensions while maintaining polishing performance.
Solution Approach 2:
The patent creates a composite polyurethane material by combining traditional polyurethane components with reactive tertiary amine compounds. This composite structure provides both the desired polishing properties and improved viscosity stability during processing, resolving the contradiction between manufacturing precision and composition stability.
2Manufacturing precision
If reactive tertiary amine compounds are incorporated to stabilize viscosity, then manufacturing precision improves, but synthesis complexity increases
Solution Approach 1:
The reactive tertiary amine compounds are incorporated into the polyurethane synthesis process itself, performing the viscosity stabilization function during the initial material creation. This preliminary action eliminates the need for separate viscosity modification steps, reducing overall process complexity while achieving consistent manufacturing results.
3Reliability
If uniform thickness is achieved through viscosity stabilization, then polishing performance improves, but processing time may increase
Solution Approach 1:
The incorporation of reactive tertiary amine compounds modifies the rheological parameters of the polyurethane melt, stabilizing viscosity across the processing temperature range. This parameter change allows for faster processing cycles without sacrificing uniformity, as the material maintains consistent flow characteristics throughout the extrusion and molding process.
Data Source
AI summary
The present disclosure relates to polyurethane comprising a reaction product of a reactive mixture including a polyester polyol, a diol chain extender, a diisocyanate; and a reactive, tertiary amine. The present disclosure further provides polishing layers and polishing pads fabricated therefrom. Additionally, the present disclosure provides polishing systems and polishing methods employing said polishing layers and polishing pads.