Porous Bump-Forming Material for Narrow Pitch Substrate Bonding

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Solution Overview

Problem

The challenge in electronic component mounting is the deformation and disconnection of substrates due to thermal expansion stress, particularly at narrow pitches, where traditional methods face difficulties in filling underfill agents and maintaining bump shape for fine fabrication.

Innovation Solution

A bump-forming material comprising a base resin, solvent, foaming agent, and photosensitizer is used, which forms a porous film upon heating, allowing for expansion and filling the gap between substrates without deformation, enhancing mechanical strength and bonding reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional reflow process with metal bumps is used, then electrical connection is achieved, but the large diameter of bumps hinders development of narrow pitches

Engineering Contradiction:
ImprovepitchVSAvoidbump diameter
Core Design Contradiction:
Manufacturing precisionVSVolume of moving object

Solution Approach 1:

The patent changes the physical and chemical parameters of the bump material by using an organic resin composition with foaming agents and photosensitizers instead of traditional metal alloys. This allows the bump diameter to be reduced to 50-200 μm while maintaining structural integrity through controlled foaming and curing processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses a composite organic resin material comprising base resin, foaming agent, photosensitizer, and solvent. This composite structure enables the bump to achieve both small diameter for narrow pitch and sufficient mechanical strength through the synergistic effects of the components

Inventive Principle:
Principle #40Composite materials

2Reliability

If underfill agent is poured after reflow process, then stress between substrates is reduced, but it is difficult to pour material due to small gap at narrow pitch

Engineering Contradiction:
Improvestress reductionVSAvoidmaterial filling
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent applies the underfill agent to the chip surface before bonding (first-in method) rather than after bonding. The agent is then expanded in-situ through foaming during the bonding process, eliminating the need for post-bonding pouring and solving the narrow gap filling problem

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The underfill agent undergoes phase transition from liquid to foam through thermal expansion during the bonding process. This volume expansion allows the material to fill the gap between substrates effectively, achieving stress reduction without requiring post-bonding pouring operations

Inventive Principle:
Principle #36Phase transitions

3Strength

If bumps are pressed and heated (reflow process), then bumps are bonded together, but bumps remain spherical which hinders fine fabrication

Engineering Contradiction:
Improvebonding strengthVSAvoidbump shape
Core Design Contradiction:
StrengthVSShape

Solution Approach 1:

The patent changes the shape parameter of bumps from spherical to rectangular through controlled expansion of the foaming agent during curing. The rectangular shape is achieved by configuring the mold cavity and controlling the foaming process, enabling fine fabrication while maintaining bonding strength

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The bump structure incorporates a porous interior formed by the foaming agent, creating a rectangular outer shape with internal voids. This porous structure reduces material usage and enables precise shape control for fine pitch applications while maintaining sufficient mechanical strength for bonding

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The material effectively reduces stress between substrates by forming a porous film that fills gaps, ensuring strong bonding and reliable semiconductor devices with reduced electrical resistance and improved thermal cycling performance.

Implementation Method 1

a foaming agent and a photosensitizer, and/or a substance that serves as a foaming agent and a photosensitizer

Methodology Applied
Scientific EffectFoaming: Foam

Implementation Method 2

a foaming agent and a photosensitizer, and/or a substance that serves as a foaming agent and a photosensitizer

Methodology Applied
Scientific EffectPhotochemical reaction: Photopolymerisation

Implementation Method 3

the vicinity of bumps is filled with an underfill agent 103 (organic resin material) after the reflow process

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS9926422B2Bump-forming material, method for producing electronic component, method for producing semiconductor device, and semiconductor device
Publication Date: 2018.03.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US9926422B2 patent drawing
  • US9926422B2 patent drawing
  • US9926422B2 patent drawing

AI summary

A material includes a base resin; a solvent; and a foaming agent and a photosensitizer, and/or a substance that serves as a foaming agent and a photosensitizer.