Position Detection Using Reference Sections in Processing Chambers
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Solution Overview
Problem
Existing techniques for detecting the position of a movable part within a processing chamber are hindered by deviations in the imaging device, leading to increased complexity and cost, as they often require correction mechanisms to maintain processing accuracy.
Innovation Solution
A position detection apparatus and method that utilize a reference section with known positioning inside the chamber, allowing for accurate detection of the movable part by estimating the deviation of the imaging device through image processing, thereby eliminating the need for complex correction structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a mover mechanism is installed to correct camera deviation, then position detection accuracy is improved, but device complexity and cost increase
Solution Approach 1:
A reference object with known position and shape is introduced as an intermediary element. The reference object serves as a mediator between the imaging device and the movable part, enabling the system to calculate and correct imaging device deviation through image processing without requiring mechanical correction mechanisms
Solution Approach 2:
The patent replaces the mechanical mover mechanism with an information-processing approach. By using image processing algorithms to detect the reference object and calculate deviation, the system substitutes mechanical correction with computational correction, thereby eliminating complex mechanical structures
2Measurement precision
If processing is suspended due to imaging device deviation, then position detection accuracy is maintained, but productivity decreases
Solution Approach 1:
The system performs preliminary deviation calculation by detecting the reference object's position in the captured image. By calculating the imaging device deviation in advance using the known reference object position, the system can correct subsequent position measurements without suspending processing
Solution Approach 2:
The system establishes a feedback loop where the detected reference object position is used to calculate deviation, which then feeds into the position detection algorithm. This continuous feedback mechanism allows real-time correction of imaging device deviation while maintaining processing continuity
Data Source
AI summary
A position detection apparatus detects the positions of movable parts 33, 43, 53 which are movable within processing space SP inside a chamber 90. An imaging device 72 shoots reference sections 61-64, which are disposed inside the chamber 90 and the positions of which are known, and the movable parts and accordingly obtains an original image. An image processor 86 executes image processing which is for detecting the movable parts and the reference sections from the original image. An image detector 86 detects the positions of the movable parts within the processing space in accordance with position information which is indicative of the positions of the movable parts and the reference sections within the original image. It is possible to accurately detect the positions of the movable parts while suppressing the influence exerted by deviation of the imaging device.