Power Converter Unit for Multi-Chamber Plasma Processing
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Solution Overview
Problem
Plasma processing equipment with multiple independent chambers often incur high installation costs due to excess power capacity from multiple independent power supplies, which is not fully utilized.
Innovation Solution
A power converter unit capable of converting electrical input power into bipolar output power to efficiently supply multiple plasma processing chambers, utilizing a single power converter unit with a control device to manage power distribution and optimize power usage across multiple chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple independent power supplies are used for each plasma processing chamber, then each chamber can operate independently with full power capacity, but installation costs increase due to excess power capacity
Solution Approach 1:
Multiple independent power supplies are merged into a single shared power supply system that serves multiple plasma processing chambers. The power converter unit consolidates the power delivery function, reducing the total number of power supplies from N (one per chamber) to one shared unit, thereby reducing installation costs while maintaining chamber operation capability.
Solution Approach 2:
The power converter unit dynamically allocates power to different chambers based on real-time demand. By controlling the switching elements, the system can dynamically adjust which chamber receives power and at what level, enabling flexible power distribution that adapts to varying process requirements without requiring dedicated power supplies for each chamber.
2Device complexity
If a single power converter unit serves multiple chambers, then installation costs are reduced, but the ability to deliver simultaneous full power to all chambers is limited
Solution Approach 1:
The power converter unit employs periodic time-multiplexed switching to deliver power to different chambers in sequential cycles. Each chamber receives full power during its designated time slot, and the switching occurs rapidly enough that each plasma process receives adequate power in a periodic manner, effectively simulating simultaneous full-power operation across all chambers.
Solution Approach 2:
The system changes the temporal parameters of power delivery by adjusting the duty cycle and switching frequency of the power converter. By varying these parameters, the system can optimize power distribution to meet different operational scenarios, ensuring that each chamber receives appropriate power levels during its active period while maintaining the overall power budget within the single converter's capacity.
3Stability of the object's composition
If power is delivered continuously to all chambers, then plasma processes can maintain stable operation, but power converter capacity requirements increase
Solution Approach 1:
Instead of continuous power delivery to all chambers simultaneously, the system implements periodic power delivery where each chamber receives power in alternating time slots. This time-multiplexed approach maintains plasma stability in each chamber during its active period while significantly reducing the peak power capacity requirement of the converter, as power is not required at full level to all chambers at the same time.
Solution Approach 2:
The periodic switching is designed to maintain continuous useful action in each plasma chamber by ensuring that power delivery cycles are frequent enough to sustain plasma processes. The switching frequency and duty cycle are optimized so that each chamber experiences continuous plasma operation without interruption, even though the physical power delivery is time-multiplexed across chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces installation costs by optimizing power delivery across multiple plasma processing chambers, allowing for simultaneous operation of multiple processes while minimizing the need for redundant power supplies.
Implementation Method 1
the power converter unit is capable of converting an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers
Implementation Method 2
With bipolar output power in this disclosure is meant an output power with an alternating current, where the current changes its direction with a frequency which may excite the plasma process (exciting frequency)
Implementation Method 3
the power converter unit comprises switching means between the power converter stage(s) and the output ports
Implementation Method 4
the switching means are configured to lead current into two opposite directions
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
Power converter unit (1, 1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b.. 9n), the unit (1, 1') comprising : one power input port (2) for connection to an electrical power delivering grid (7), at least two, preferably more than two, power output ports (3a, 3b,.. 3n) each for connection to one of the plasma process chambers (9a, 9b,... 9n), a control device (4) configured to control the unit (1, 1') to deliver the bipolar output power to the power output ports (3a, 3b,.. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, by obtaining a full set of desired values for the parameters for the output ports (3a, 3b,.. 3n), calculating whether the power converter unit (1, 1') is capable of delivering every desired parameter to every for the output ports (3a, 3b,.. 3n), and if this is the case, calculating a sequence of pulses of power delivery to the output ports (3a, 3b,.. 3n) in order to supply the power to the plasma processes.