Power Semiconductor Device With Non-Uniform Gate Work Function

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Solution Overview

Problem

Conventional power semiconductor devices face a trade-off between minimizing on-state losses and decreasing short circuit current, with techniques to reduce short-circuit current often resulting in higher on-state losses and vice versa, limiting their application in high-reliability and efficiency requirements.

Innovation Solution

The implementation of a power semiconductor device with a non-uniform work function profile along the channel region, combined with non-uniform thickness and doping profiles, to locally adjust the threshold voltage, thereby reducing saturation and short-circuit currents without affecting on-state losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional techniques are used to reduce short-circuit current, then short circuit capability is improved, but on-state losses increase

Engineering Contradiction:
Improveshort circuit capabilityVSAvoidon-state losses
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The gate electrode is divided into multiple sections along the channel region, with each section having a different work function. This creates local variations in threshold voltage along the channel, allowing the short-circuit current to be reduced in specific regions while maintaining low on-state losses in other regions. The non-uniform work function profile enables spatially selective control of carrier flow.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The work function of the gate electrode is changed from a uniform parameter to a non-uniform parameter that varies along the channel region. This parameter change allows independent optimization of different regions: sections with higher work function reduce short-circuit current, while sections with lower work function maintain low on-state resistance, thereby resolving the contradiction between short circuit capability and on-state losses.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If uniform threshold voltage is used, then manufacturing is simpler, but performance optimization is limited

Engineering Contradiction:
Improvegate electrode fabricationVSAvoidelectrical behavior
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The gate electrode is segmented into multiple sections along the channel region, with each section having a different work function. This segmentation allows independent optimization of electrical characteristics in different regions while maintaining a relatively simple overall structure. The segmented design can be implemented using standard fabrication techniques by forming the gate electrode in sections or using multiple deposition steps.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances short circuit capability while maintaining low on-state losses, allowing for independent optimization of other loss-reducing methods, thus improving the overall performance of power semiconductor devices.

Implementation Method 1

the gate electrode has a non-uniform work function profile along the channel region, such that a threshold voltage of the gate electrode is highest in a first section of the channel region remote from the source region

Methodology Applied
Scientific EffectWork function:

Data Source

PatentEP4120361A1Power semiconductor device
Publication Date: 2023.01.18 HITACHI ENERGY LTD
  • EP4120361A1 patent drawingFigure 1~3
  • EP4120361A1 patent drawingFigure 4~5
  • EP4120361A1 patent drawingFigure 6~7

AI summary

In at least one embodiment, the power semiconductor device (1) comprises: - a semiconductor body (2) having a source region (21) of a first conductivity type and a well region (22) of a second conductivity type different from the first conductivity type, and the well region (22) comprises a channel region (220) starting directly at the source region (21), and - a gate insulator (4) directly between the semiconductor body (2) and a gate electrode (31), wherein the gate electrode (4) has a non-uniform work function profile (6) along the channel region (220), such that a threshold voltage (Vth) is highest in a first section (61) remote from the source region (21).