Pre-Wet Module Layout for Compact Cleaning and Deaeration

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Solution Overview

Problem

Existing pre-wet modules require a large space due to the need to invert the substrate holder upside down and move it vertically, leading to increased module size, especially in the height direction.

Innovation Solution

A pre-wet module design featuring a stage that holds substrates with the processing surface facing upward, a rotation mechanism for rotating the stage, a cleaning liquid supply member with a nozzle above the stage, and a deaerated liquid supply member that can move between a supply position and a retracted position.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the substrate holder is inverted upside down and moved vertically to perform pre-processes, then the cleaning and deaeration processes can be performed, but the module size especially in the height direction increases

Engineering Contradiction:

Improvepre-process performance capabilityVSAvoidmodule height

Core Design Contradiction:

ProductivityVSLength of stationary object

Solution Approach 1:

Instead of inverting the substrate holder upside down as in conventional designs, this patent maintains the substrate holder in an upright position with the processing surface facing upward. The deaeration tank is positioned below the stage, and deaerated liquid is supplied upward to the substrate surface, achieving the pre-process functions without requiring vertical inversion movements.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent repositions the deaeration tank from an overhead position to a below-stage position, changing the spatial arrangement from vertical downward supply to vertical upward supply. This dimensional reconfiguration eliminates the need for large vertical clearance while maintaining effective deaeration functionality.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the substrate holder is moved up and down in the vertical direction, then different pre-processes can be performed on multiple substrates, but the space required increases

Engineering Contradiction:

Improvemulti-substrate processing capabilityVSAvoidmodule space

Core Design Contradiction:

Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

The stage structure is designed to perform multiple functions: it holds substrates with the processing surface facing upward, rotates to enable different processing angles, and positions substrates for both cleaning liquid supply from above and deaerated liquid supply from below. This multi-functional design eliminates the need for separate holders for different processes.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines the cleaning process and deaeration process into a single integrated stage structure. Both cleaning liquid nozzles and deaeration liquid supply are configured to work simultaneously on the same substrate holder, merging multiple process functions into one compact unit.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design allows for efficient performance of cleaning and deaeration processes without the need to invert the substrate holder, resulting in a smaller module size, particularly in height, while enabling concurrent processing of multiple substrates.

Implementation Method 1

The rotation mechanism 224 is configured to rotate the stage 220

Methodology Applied

Scientific EffectCentrifugal force: Centrifugal Force

Implementation Method 2

The deaerated liquid supply member 250 is configured to supply a deaerated liquid to a surface to be processed WF-a of a substrate WF held onto the stage 220

Methodology Applied

Scientific EffectCapillary action: Capillary Action

Implementation Method 3

The cleaning liquid supply member 260 has a nozzle 262 arranged above the stage 220 and is configured to supply a cleaning liquid in a direction to the stage 220 via the nozzle 262

Methodology Applied

Scientific EffectFluid spray: Fluid Spray

Data Source

PatentUS20250038014A1Pre-wet module

Publication Date: 2025.01.30 EBARA CORP

AI summary

To achieve a small-sized pre-wet module that can perform different pre-processes.A pre-wet module 200 includes a stage 220, a rotation mechanism 224, a cleaning liquid supply member 260, and a deaerated liquid supply member 250. The stage 220 is configured to hold a back surface of a substrate WF with a surface to be processed WF-a facing upward. The rotation mechanism 224 is configured to rotate the stage 220. The cleaning liquid supply member 260 has a nozzle 262 arranged above the stage 220. The cleaning liquid supply member 260 is configured to supply a cleaning liquid in a direction to the stage 220 via the nozzle 262. The deaerated liquid supply member 250 is configured to supply a deaerated liquid to a surface to be processed WF-a of a substrate WF held onto the stage 220. The deaerated liquid supply member 250 is configured to be movable between a supply position and a retracted position. The supply position is located between the nozzle 262 and the surface to be processed WF-a of the substrate WF, and the retracted position is retracted from between the nozzle 262 and the surface to be processed WF-a of the substrate WF.