Precessing Electron Beam for Accurate Chemical Analysis

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Solution Overview

Problem

Existing electron microscopy methods face inaccuracies in chemical and crystallographic analysis due to object movement or change during analysis, particularly in analyzing phase-change materials and components with structural or thermal displacements.

Innovation Solution

A method involving the emission of a precessing electron beam with simultaneous acquisition of electron diffraction patterns and X-ray intensity values, allowing for accurate determination of chemical composition and crystalline structure, even when the object is moving or changing, by using a precessional motion with a controlled angle and frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a stationary electron beam is used for analysis, then the analysis method is simple, but the analysis accuracy deteriorates when the object moves or changes during analysis

Engineering Contradiction:
Improveanalysis method simplicityVSAvoidchemical and crystallographic analysis accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The electron beam is transformed from a stationary state to a dynamic precessing state, where it rotates around the optical axis while maintaining its focus on the sample. This dynamic configuration allows the beam to continuously sample different angular positions, effectively tracking and analyzing moving or changing objects with improved accuracy while maintaining methodological simplicity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The electron beam performs periodic precessional motion around the optical axis at a controlled frequency. This periodic action ensures that the beam systematically covers all angular positions around the focal point, enabling complete spatial sampling of the object regardless of its movement or changes during analysis, thereby maintaining high measurement precision.

Inventive Principle:
Principle #19Periodic action

2Productivity

If the electron beam is focused on a single point, then the analysis is quick, but the analysis reliability deteriorates due to object displacement

Engineering Contradiction:
Improveanalysis speedVSAvoidanalysis reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

Instead of maintaining a fixed focal point, the electron beam dynamically precesses around the optical axis while remaining focused on the sample region. This dynamic focusing approach allows the beam to continuously track the object of interest even when it moves or changes, maintaining both analysis speed and reliability by keeping the focal region centered on the moving target.

Inventive Principle:
Principle #15Dynamics

3Device complexity

If sequential acquisition of diffraction pattern and X-ray spectrum is performed, then the equipment requirement is simple, but the measurement precision deteriorates due to object change between measurements

Engineering Contradiction:
Improveequipment requirementVSAvoidchemical and crystallographic analysis accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The acquisition of electron diffraction patterns and X-ray spectral data is merged into a simultaneous process. Both types of data are collected at the same time while the electron beam precesses around the optical axis, ensuring that the object remains in the same state during both measurements. This eliminates timing discrepancies caused by object movement or changes, significantly improving measurement precision without requiring complex additional equipment.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides a more accurate chemical and crystallographic analysis by synchronizing the precessional motion with data acquisition, reducing the impact of object displacement or change, and enhancing the precision of chemical composition and crystalline phase determination.

Implementation Method 1

the acquisition, at least partly simultaneous, of an electron diffraction pattern

Methodology Applied
Scientific EffectElectron diffraction: Diffraction

Implementation Method 2

the acquisition, at least partly simultaneous, of intensity values of X rays

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentUS11686693B2Electron microscopy analysis method
Publication Date: 2023.06.27 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • US11686693B2 patent drawing
  • US11686693B2 patent drawing
  • US11686693B2 patent drawing

AI summary

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.