Pressure Sensor With Patterned Electrode For Noise Reduction
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Solution Overview
Problem
MEMS microphones face challenges in reducing background noise, which affects communication quality, and existing technologies have not adequately addressed this issue to improve noise suppression effectively.
Innovation Solution
A pressure sensor design comprising a substrate, dielectric oxide layer, first electrode, dielectric connection layer, and a second electrode with a patterned conductive layer and dielectric layer, which forms a chamber to enhance stress tolerance, frequency response, and reduce parasitic capacitance, while using materials compatible with CMOS processes for improved performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a conventional MEMS microphone structure is used, then the device can capture sound, but the background noise affects communication quality
Solution Approach 1:
The microphone structure is divided into multiple functional chambers: a first chamber for sound collection and a second chamber for noise suppression. This segmentation allows independent optimization of each function, enabling effective background noise reduction while maintaining sound capture capability, thereby improving communication quality.
Solution Approach 2:
A movable partition wall with aperture is introduced as an intermediary element between the first and second chambers. This partition wall can dynamically adjust its position and the aperture size to control the interaction between sound waves in the two chambers, enabling adaptive noise suppression while preserving communication quality.
2Reliability
If the microphone structure is made more complex to reduce background noise, then communication quality improves, but the device complexity increases
Solution Approach 1:
The movable partition wall with aperture serves multiple functions simultaneously: it acts as a acoustic barrier, a flow control element, and a structural support. This multi-functionality reduces the need for separate dedicated components for each function, thereby improving communication quality while limiting the increase in device complexity.
Solution Approach 2:
The second chamber is positioned within or adjacent to the first chamber structure, with the partition wall integrating both chambers into a compact unified design. This nested arrangement allows the noise suppression function to be embedded within the existing microphone structure rather than adding a completely separate system, thus improving communication quality with minimal complexity increase.
3Object-affected harmful factors
If existing noise suppression technology is applied, then background noise is reduced, but the stress tolerance and frequency response are not adequately improved
Solution Approach 1:
The partition wall is designed with a specific aperture configuration that creates localized acoustic zones. The aperture size and position are optimized to selectively transmit certain frequencies while blocking others, thereby improving frequency response precision. The local acoustic properties are tailored to enhance noise suppression effectiveness without compromising overall frequency response.
Solution Approach 2:
The movable partition wall can dynamically adjust its position and the aperture size in response to acoustic conditions. This dynamic adjustment allows the system to optimize its frequency response characteristics in real-time, adapting to different noise environments and speech patterns. The dynamic mechanism enables precise control over which frequencies are transmitted to the sensing element, improving both noise suppression and frequency response.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces background noise and enhances communication quality by increasing stress variation tolerance, improving frequency response, and increasing sensitivity through stress balance and reduced parasitic capacitance, making it suitable for applications like voice secretary and voice navigation.
Implementation Method 1
a first electrode 120, a dielectric connection layer 130 and a second electrode 140... The first electrode 120 has a plurality of slots 120t... a first chamber 150 is between the first electrode 120 and the second electrode 140
Data Source
AI summary
A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.