Processing Chamber Pressure Sequencing for Uniform Material Heating
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Solution Overview
Problem
In electronic product manufacturing, bubbles and temperature non-uniformity lead to reduced reliability and yield due to inaccuracies in temperature measurement and control.
Innovation Solution
A material processing apparatus with a processing chamber, external pressure source, pressure reducer, temperature regulator, and controller that increases temperature and pressure to predetermined levels while maintaining pressure until the temperature reaches the set point, ensuring uniform heating and reducing errors in temperature measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If temperature is increased to process material, then processing effectiveness is improved, but temperature uniformity deteriorates causing measurement errors
Solution Approach 1:
The pressure is increased to a predetermined level before the temperature is increased to the processing temperature. This preliminary pressurization prevents bubble formation during subsequent heating, ensuring temperature uniformity throughout the material without compromising processing effectiveness.
2Productivity
If pressure is reduced during heating, then processing speed is improved, but temperature measurement accuracy deteriorates
Solution Approach 1:
The system performs preliminary pressurization before heating to prevent bubble formation. By maintaining pressure during the heating phase, the material remains in a dense state where temperature measurements accurately reflect the actual material temperature, enabling both fast processing and accurate measurement.
3Device complexity
If pressure is not controlled during heating, then process simplicity is improved, but product quality deteriorates due to bubbles
Solution Approach 1:
The controller automatically increases pressure to a predetermined level before initiating temperature increase. This preliminary action prevents bubble formation during heating, ensuring high product quality and reliability while maintaining relatively simple process control through automated sequencing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves temperature uniformity across the material, enhancing control accuracy and product reliability and yield by maintaining pressure until the desired temperature is reached, thus accurately switching parameters and simplifying the manufacturing process.
Implementation Method 1
The controller is adapted for controlling the external pressure source and temperature regulator to respectively increase a temperature and a pressure in the processing chamber to a first predetermined temperature and a first predetermined pressure
Implementation Method 2
The temperature regulator is disposed in the processing chamber to adjust a temperature in the internal space
Implementation Method 3
The pressure reducer is connected to the processing chamber, and is adapted for performing a depressurization action in the internal space
Data Source
AI summary
A material processing apparatus including a processing chamber, an external pressure source, a pressure reducer, a temperature regulator, and a controller is provided. The processing chamber has an internal space. The external pressure source is connected to the processing chamber to pressurize the internal space. The pressure reducer is connected to the processing chamber to depressurize the internal space. The temperature regulator is arranged in the processing chamber to adjust the temperature in the internal space. The controller is configured to control the external pressure source and the temperature regulator to respectively increase the temperature to a first predetermined temperature and the pressure to a first predetermined pressure, and to control the pressure in the processing chamber to rise continuously before the temperature in the processing chamber rises to the first predetermined temperature. An operating method of a material processing apparatus is further provided.