Pre-Wet Module Layout for Concurrent Substrate Deaeration
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Solution Overview
Problem
The existing pre-wet modules in plating apparatuses have a low throughput as they process substrates sequentially, requiring exclusive use for each substrate, which limits the efficiency of preprocesses like deaeration and cleaning.
Innovation Solution
A pre-wet module with a deaeration tank, a processing device, and a drive mechanism that allows concurrent processing of multiple substrates by rotating and moving a substrate holder between different states, enabling simultaneous deaeration and cleaning of multiple substrates using a nozzle system and elevating mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single substrate holder is used to hold one substrate at a time, then the structure is simple and easy to operate, but the throughput is low because substrates must be processed sequentially
Solution Approach 1:
The substrate holder is divided into multiple holding members (first holding member, second holding member, etc.), each capable of holding a separate substrate. This segmentation allows multiple substrates to be held simultaneously on a single holder, enabling parallel processing and improving throughput without requiring multiple separate holders.
Solution Approach 2:
The substrate holder is designed as a multi-functional device that can simultaneously perform multiple functions: holding multiple substrates, rotating to position different substrates, and coordinating with the deaeration tank and processing device. This multi-functionality allows the same holder to serve multiple purposes, increasing productivity while avoiding the need for separate specialized holders for each function.
2Productivity
If the substrate holder is rotated to position different substrates, then multiple substrates can be processed concurrently to improve throughput, but the mechanism complexity increases
Solution Approach 1:
The rotation mechanism and elevating mechanism are combined into a single drive mechanism that coordinates both movements. This integration allows the substrate holder to perform both rotational positioning and vertical movement in a coordinated manner, enabling concurrent processing of multiple substrates while managing complexity through unified control rather than separate independent mechanisms.
Solution Approach 2:
The substrate holder is designed with dynamic capabilities, including rotation to different positions and elevation to different heights. This dynamic design allows the holder to adapt its configuration during operation, positioning different substrates as needed for concurrent processing with the deaeration tank and processing device, thereby improving productivity through flexible, multi-position operation.
3Manufacturing precision
If one substrate is processed exclusively in the pre-wet module, then the processing quality is maintained, but the time required for subsequent substrates increases due to sequential processing
Solution Approach 1:
The system enables continuous useful action by allowing multiple substrates to be processed concurrently rather than sequentially. While one substrate undergoes deaeration in the deaeration tank, another substrate can simultaneously undergo cleaning by the processing device. This continuous parallel operation maintains processing quality for each substrate while eliminating idle time between sequential operations, thereby reducing total processing time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves the throughput of the pre-wet module by allowing concurrent processing of multiple substrates, enhancing the efficiency of preprocesses such as deaeration and cleaning.
Implementation Method 1
a pre-wet module that performs various kinds of preprocesses, such as a deaeration process
Implementation Method 2
a nozzle configured to supply a cleaning liquid to a surface to be processed of a substrate
Data Source
AI summary
A preprocess is efficiently performed on a substrate. A pre-wet module 200 includes a deaeration tank 210, a processing device 258, a substrate holder 220, and a drive mechanism 230. The deaeration tank 210 is configured to house a deaerated liquid. The processing device 258 includes a nozzle 268 configured to supply a cleaning liquid to a surface to be processed of a substrate having the surface to be processed facing upward. The substrate holder 220 is disposed between the deaeration tank 210 and the processing device 258. The substrate holder 220 includes a first holding member 222 configured to hold a first substrate and a second holding member 224 configured to hold a second substrate. The drive mechanism 230 is configured to rotate and move up and down the substrate holder 220. The drive mechanism 230 includes a rotation mechanism 240 and an elevating mechanism 248. The rotation mechanism 240 is configured to rotate the substrate holder 220 between a first state where a surface to be processed of the first substrate is opposed to a deaerated liquid in the deaeration tank 210 and a second state where a surface to be processed of the second substrate is opposed to the deaerated liquid in the deaeration tank. The elevating mechanism 248 is configured to move up and down the substrate holder 220.