Pre-Wet Module Rotation Layout for Concurrent Substrate Processing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing pre-wet modules in plating apparatuses have low throughput as they process substrates sequentially, requiring exclusive use for each substrate, leading to inefficiencies in preprocesses like deaeration and cleaning.

Innovation Solution

A pre-wet module with a deaeration tank, a processing device, and a drive mechanism that allows concurrent processing of multiple substrates by rotating and moving a substrate holder between different states, enabling simultaneous deaeration and cleaning of multiple substrates using a nozzle system and elevating mechanism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a substrate holder holds only one substrate for preprocessing, then the structure is simple and easy to control, but the throughput is low because substrates must be processed sequentially

Engineering Contradiction:

ImprovethroughputVSAvoidsubstrate holder structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The substrate holder is segmented into multiple holding members (first holding member, second holding member, etc.), each capable of holding a separate substrate. This segmentation allows multiple substrates to be positioned at different locations on the holder, enabling concurrent processing of multiple substrates while maintaining individual control over each substrate's position and orientation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The substrate holder utilizes three-dimensional spatial arrangement by extending in multiple directions (radial and axial dimensions). Holding members are distributed in different spatial locations and orientations, allowing substrates to be arranged in a three-dimensional configuration rather than a single linear sequence, thereby increasing throughput without proportionally increasing complexity.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Productivity

If the substrate holder is rotated to position different substrates for processing, then multiple substrates can be processed concurrently, but the mechanism complexity increases

Engineering Contradiction:

Improveconcurrent processing capabilityVSAvoiddrive mechanism

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The drive mechanism serves multiple functions: it rotates the substrate holder to position different substrates, elevates the holder to control immersion depth, and coordinates motion to enable concurrent processing. This multi-functionality reduces the need for separate mechanisms for each substrate, thereby increasing productivity while limiting the growth of overall system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Productivity

If substrates are processed sequentially in a pre-wet tank, then the equipment configuration is simple, but the preprocessing efficiency is low

Engineering Contradiction:

Improvepreprocessing efficiencyVSAvoidequipment configuration

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The system enables continuous useful action by allowing multiple substrates to be processed simultaneously in the pre-wet tank. While one substrate is being deaerated, another can be cleaned or prepared, eliminating idle time and ensuring that the processing equipment is continuously productive. This continuity significantly improves preprocessing efficiency without requiring completely separate processing lines.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly improves the throughput of the pre-wet module by allowing concurrent processing of multiple substrates, enhancing the efficiency of preprocesses such as deaeration and cleaning.

Implementation Method 1

a deaeration tank configured to house deaerated liquid

Methodology Applied

Scientific EffectDeaeration:

Implementation Method 2

a nozzle configured to supply cleaning liquid to a surface to be processed of a substrate

Methodology Applied

Scientific EffectFluid spray: Fluid Spray

Data Source

PatentUS11833551B2Pre-wet module, deaerated liquid circulation system, and pre-wet method

Publication Date: 2023.12.05 EBARA CORP

AI summary

A preprocess is efficiently performed on a substrate. A pre-wet module 200 includes a deaeration tank 210, a processing device 258, a substrate holder 220, and a drive mechanism 230. The deaeration tank 210 is configured to house a deaerated liquid. The processing device 258 includes a nozzle 268 configured to supply a cleaning liquid to a surface to be processed of a substrate having the surface to be processed facing upward. The substrate holder 220 is disposed between the deaeration tank 210 and the processing device 258. The substrate holder 220 includes a first holding member 222 configured to hold a first substrate and a second holding member 224 configured to hold a second substrate. The drive mechanism 230 is configured to rotate and move up and down the substrate holder 220. The drive mechanism 230 includes a rotation mechanism 240 and an elevating mechanism 248. The rotation mechanism 240 is configured to rotate the substrate holder 220 between a first state where a surface to be processed of the first substrate is opposed to a deaerated liquid in the deaeration tank 210 and a second state where a surface to be processed of the second substrate is opposed to the deaerated liquid in the deaeration tank. The elevating mechanism 248 is configured to move up and down the substrate holder 220.