Probe Alignment Offset Vector for Multi-Device Sample Transfer

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Solution Overview

Problem

Scanning probe microscopes face challenges in accurately aligning probe tips due to manufacturing errors, leading to tip error vectors that affect precise positioning and efficient sample transfer between different analytical devices.

Innovation Solution

A method that involves moving the probe laterally relative to the detection beam to align it with the beam, using a fiducial marker for calibration to determine and store an offset vector, allowing for accurate alignment and transfer of samples between a scanning probe microscope and other devices like SEM or FIB systems, enabling quick and precise movement of samples.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the probe tip position is not accurately known due to manufacturing errors, then the tip error vector cannot be accurately accounted for, but replacing the probe repeatedly increases time loss and reduces productivity

Engineering Contradiction:

Improvetip position accuracyVSAvoidtime for probe replacement and realignment

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The offset vector between the probe tip and the cantilever center of mass is determined and stored in advance through a calibration procedure. This preliminary characterization of the probe allows for accurate positioning without repeating the calibration when probes are replaced, thus reducing time loss while maintaining measurement precision.

Inventive Principle:

Principle #10Preliminary action

2Adaptability or versatility

If the sample is moved between multiple devices for analysis and modification, then comprehensive characterization is improved, but alignment accuracy deteriorates due to cumulative positioning errors

Engineering Contradiction:

Improvemulti-device sample analysis capabilityVSAvoidsample alignment accuracy between devices

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The probe serves as an intermediary reference element that is precisely positioned relative to both the first device (scanning probe microscope) and the second device (scanning electron microscope). By using the probe's known offset vector as a reference, the sample can be accurately transferred between devices without accumulating positioning errors, enabling comprehensive characterization while maintaining alignment precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If the detection beam is moved to align with the probe, then the probe positioning system complexity is reduced, but the offset between the detection beam and the second device becomes variable and unknown

Engineering Contradiction:

Improveprobe positioning system complexityVSAvoidoffset knowledge accuracy between detection beam and second device

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

Instead of moving the detection beam to align with the probe, the invention moves the probe laterally to align with the detection beam. This inversion of the alignment approach allows the probe positioning system to establish a known reference position, and the offset vector between the detection beam and the second device can be accurately determined and stored, maintaining measurement precision while simplifying the system.

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method ensures accurate accounting for tip error vectors, allowing for precise alignment and efficient transfer of samples between devices, maintaining alignment consistency even with new probes, and enabling multi-device operations within a shared vacuum chamber.

Implementation Method 1

moving a probe laterally relative to a detection beam so that it is aligned with the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS10107834B2Measurement system

Publication Date: 2018.10.23 INFINITESIMA LTD

AI summary

A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.