Probe Card Positioning Through Inspection-Hole Edge Alignment
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Solution Overview
Problem
The existing positioning accuracy between a probe card and a semiconductor element is affected by the mounting position accuracy of a small bar used for alignment, leading to inefficiencies in alignment and measurement processes.
Innovation Solution
A positioning device for a probe card that includes a probe card with an inspection hole and an imaging unit, allowing alignment of a specific peripheral edge portion of the inspection hole with a characteristic portion of the semiconductor element at a minute interval through the imaging unit's field of view, thereby improving positioning accuracy without additional positioning members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a small bar is used for alignment between the probe card and semiconductor element, then alignment can be performed, but positioning accuracy is affected by the mounting position accuracy of the small bar
Solution Approach 1:
The invention extracts the positioning function from the small bar alignment method and relocates it to the inspection hole itself. The inspection hole's peripheral edge portion serves as the positioning reference, eliminating the need for separate small bars and their mounting structures. This extraction resolves the contradiction by removing the source of positioning error (small bar mounting accuracy) while maintaining the alignment function.
Solution Approach 2:
The inspection hole performs dual functions: it serves as both the inspection opening and the positioning reference. The peripheral edge portion of the inspection hole automatically provides positioning capability without requiring additional components. This self-service approach eliminates the dependency on external positioning members and their mounting accuracy, directly improving positioning accuracy while reducing system complexity.
2Measurement precision
If additional positioning members are added to improve alignment, then positioning accuracy improves, but device complexity increases
Solution Approach 1:
The inspection hole is designed to serve multiple functions simultaneously: it acts as the inspection opening for observing the semiconductor element and as the positioning reference for alignment. The peripheral edge portion of the inspection hole provides positioning capability without requiring separate positioning members. This multi-functionality resolves the contradiction by eliminating the need for additional components while maintaining high positioning accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances positioning accuracy and ease of alignment between the probe card and the semiconductor element, eliminating the need for additional positioning members and ensuring precise electrical contact with electrode pads.
Implementation Method 1
an imaging unit (a camera) configured to capture an image of the device to be measured through the inspection hole
Data Source
AI summary
A positioning device of a probe card includes: a probe card including a probe, which is electrically contactable with an electrode of a device to be measured, and an inspection hole; and a camera configured to capture an image of the device to be measured through the inspection hole. A positional relationship between the probe and a specific peripheral edge portion of the inspection hole is known. Positioning of the probe card is performed by aligning the specific peripheral edge portion with or bringing the specific peripheral edge portion close to a characteristic portion of the device to be measured at a minute interval, in a field of view of the camera.