Multi-Module Probe Card Handling for Faster Independent Replacement
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Solution Overview
Problem
Conventional probe card transporting robots can only load a single probe card, requiring multiple robots to change probe cards, which is inefficient and occupies excessive space in semiconductor fabrication plants.
Innovation Solution
A probe card transporting apparatus with multiple loading modules and a hand gripper module that can autonomously navigate and load/unload multiple probe cards, allowing for independent replacement of probe cards within a semiconductor fabrication plant.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single probe card transporting robot is used, then the device complexity is reduced, but the productivity decreases because it can only load one probe card at a time
Solution Approach 1:
The probe card transporting robot is divided into multiple loading modules (first loading module, second loading module, etc.), each capable of holding a probe card. This segmentation allows the single robot to carry multiple probe cards simultaneously, improving productivity without increasing the number of robots.
Solution Approach 2:
Each loading module is designed with the same functional capability to hold and transport probe cards. The hand gripper module can interact with any loading module uniformly, creating a universal system where components can be replicated and combined to handle multiple probe cards with the same operational principles.
2Productivity
If multiple probe card transporting robots are used to change probe cards, then the productivity increases, but the area occupied in the fabrication plant increases
Solution Approach 1:
Multiple loading modules are merged into a single probe card transporting robot body. The first loading module, second loading module, and hand gripper module are integrated into one coordinated system, allowing the robot to perform multiple probe card operations from a single platform, thereby reducing the space required compared to having separate robots.
Solution Approach 2:
The loading modules are arranged in different spatial configurations (e.g., vertically stacked or horizontally extended) to maximize the use of three-dimensional space within the single robot structure, allowing multiple probe cards to be carried without proportionally increasing the robot's footprint on the fabrication plant floor.
3Area of stationary object
If multiple loading modules are integrated into one robot, then the area occupied is reduced, but the device complexity increases
Solution Approach 1:
The loading modules are designed to be movable relative to each other and to the robot body. The first loading module can move between a first position and a second position, and the hand gripper module can transition between different operational positions. This dynamic design allows the system to reconfigure for different operations, reducing the need for complex fixed structures.
Solution Approach 2:
The loading modules and hand gripper module are nested within the robot body structure, with components arranged in a compact, space-efficient configuration. The first loading module, second loading module, and hand gripper module are positioned to utilize the internal volume of the robot, reducing the overall external dimensions and structural complexity.
Data Source
AI summary
A probe card transporting apparatus and method capable of loading a plurality of probe cards and enabling the replacement of probe cards independently are provided. The probe card transporting apparatus includes: a first loading module where a first probe card, which is a replacement probe card, is mounted; a second loading module where a second probe card to be replaced is mounted; and a hand gripper module withdrawing the second probe card from a probe station for semiconductor testing or inserting the first probe card into the probe station.