Probe Cassette Vacuum Release Sequence for Automated SPM Transfer

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing scanning probe microscopes require manual probe replacement, which is skill-intensive, disrupts instrument use, and lacks accurate alignment control, leading to potential damage and inefficiency.

Innovation Solution

A probe cassette with selectively activatable vacuum channels allows automated probe transfer by maintaining the probe's mounting position through controlled vacuum release, ensuring precise alignment and reducing manual intervention.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual probe replacement is used, then the operator can replace the probe, but the procedure requires significant skill, causes instrument unavailability, and lacks precise alignment control

Engineering Contradiction:
Improveprobe replacement operationVSAvoidinstrument unavailability
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The system enables self-service automated probe exchange where the pick-up means automatically grasps, transfers, and aligns probes without human intervention. The controller coordinates the entire process including activating the pick-up means, moving the probe to the probe mount, and adjusting alignment, eliminating the need for skilled manual operation and restoring instrument availability continuously

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Manual mechanical probe handling is replaced with an automated mechanical system consisting of a pick-up means (such as a gripper or suction device), a controller, and a probe mount. This automated mechanical system performs all probe replacement tasks including grasping, transferring, and positioning, eliminating manual skill requirements and reducing instrument downtime

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Extent of automation

If automated probe exchange is implemented, then probe replacement can be automated, but control over the probe chip during transfer may be insufficient leading to inaccurate alignment

Engineering Contradiction:
Improveprobe exchange automationVSAvoidprobe alignment accuracy
Core Design Contradiction:
Extent of automationVSManufacturing precision

Solution Approach 1:

The system incorporates feedback control where the controller monitors the probe transfer process and automatically adjusts the alignment of the probe mount or pick-up means based on detected position deviations. This closed-loop control ensures accurate probe alignment even during automated transfer, maintaining manufacturing precision while achieving full automation

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The probe mount and pick-up means are designed with dynamic adjustment capabilities, allowing real-time modification of position and orientation during the automated transfer process. This dynamic control enables the system to compensate for positioning variations and achieve precise probe alignment automatically, resolving the contradiction between automation extent and alignment accuracy

Inventive Principle:
Principle #15Dynamics

3Reliability

If the probe is held in storage, then the probe can be protected, but the vacuum must be maintained to keep the probe in position

Engineering Contradiction:
Improveprobe storage stabilityVSAvoidvacuum maintenance
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The vacuum system is segmented into separate controllable vacuum chambers or zones within the probe storage and transfer mechanism. This allows the controller to apply vacuum only to specific regions where probes are stored or being handled, rather than maintaining vacuum throughout the entire system, thereby reducing energy consumption while maintaining probe storage stability through localized vacuum application

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate, automated probe exchange with reduced instrument downtime, improved alignment, and minimized risk of damage, while allowing external storage for reduced contamination.

Implementation Method 1

a first vacuum channel with flow resistance R1 and second vacuum channel with a flow resistance R2 respectively fluidly connecting the first and second vacuum chamber to an outlet fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage may be maintained

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentEP4055393B1Probe cassette for holding a probe in storage for use in a scanning probe microscope
Publication Date: 2026.04.22 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • EP4055393B1 patent drawingFigure 1A~1B
  • EP4055393B1 patent drawingFigure 2
  • EP4055393B1 patent drawingFigure 3A~3B

AI summary

The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.