Probe Microscopy of Liquid-Filled Trenches With Wear-Tolerant Tips

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Solution Overview

Problem

Existing methods face difficulties in inserting a probe tip into trenches due to tip bending caused by attractive forces from the trench walls, especially in high aspect ratio features with narrow entrances and steep side walls.

Innovation Solution

The method involves filling the feature with a liquid, such as a polar solvent, to mitigate the attractive forces, using a probe tip with a low bending spring constant and high aspect ratio, and ensuring a reserve portion of the tip remains outside the feature to accommodate wear.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If a probe tip with high aspect ratio is used to access deep trenches, then the ability to reach into deep features is improved, but the probe tip becomes more susceptible to bending from attractive forces

Engineering Contradiction:

Improveprobe tip lengthVSAvoidprobe tip bending

Core Design Contradiction:

Length of moving objectVSStability of the object's composition

Solution Approach 1:

The patent changes the physical parameters of the probe tip by reducing the bending spring constant through specific geometric design (high aspect ratio with length-to-width ratio greater than 5, 10, or 20). This allows the probe tip to be sufficiently flexible to navigate tight spaces while maintaining structural integrity for measurement.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The probe tip is designed with a segmented structure consisting of a base portion and a distal portion with different geometric characteristics. The distal portion has reduced cross-sectional dimensions to minimize bending while the base portion provides structural support, allowing the tip to reach deep features without excessive bending.

Inventive Principle:

Principle #1Segmentation

2Ease of operation

If the probe tip is made sharper to access narrow entrances, then the ability to enter narrow features is improved, but the probe tip becomes more prone to wear

Engineering Contradiction:

Improveease of insertionVSAvoidprobe tip wear

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The probe tip is divided into functional segments: a sharp distal portion for navigating narrow entrances and a broader base portion for structural support and wear resistance. This segmentation allows the sharp tip to access narrow features while the thicker base reduces overall wear during insertion and measurement operations.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different portions of the probe tip have different geometric properties optimized for their specific functions. The distal portion has sharp, narrow dimensions for easy insertion into narrow features, while the base portion has larger cross-sectional dimensions for structural strength and reduced wear during handling and measurement.

Inventive Principle:

Principle #3Local quality

3Measurement precision

If the probe tip is inserted deep into the feature, then the measurement accuracy is improved, but the probe tip is more exposed to wear and damage

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidprobe tip durability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The probe tip structure separates the measurement function (distal portion) from the structural support function (base portion). The distal portion can be inserted deep for accurate measurement while the thicker base portion protects against wear and damage during insertion and retraction operations.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The broader base portion of the probe tip acts as a protective cushion before the sharp distal portion. This thicker section absorbs mechanical stresses and wear during insertion and retraction, protecting the measurement-critical distal portion from damage while allowing deep insertion for accurate measurements.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach facilitates easier insertion and contact with the feature base, maintaining probe tip sharpness and enabling repeated measurements despite wear, even in challenging geometries.

Implementation Method 1

the feature is filled with a liquid

Methodology Applied

Scientific EffectLiquid filling:

Data Source

PatentUS20250377377A1Method of measuring feature with probe microscope

Publication Date: 2025.12.11 INFINITESIMA LTD

AI summary

A method of measuring a feature with a probe microscope. The feature comprises a base, an entrance, and a pair of opposed side walls. The feature is filled with a liquid. The probe microscope comprises a cantilever and a probe tip extending from the cantilever. The method comprises: inserting the probe tip into the feature via the entrance; and performing a measurement of the feature by contacting the base of the feature with the probe tip.