Movable Abrasive Sheet for Probe Polishing
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Solution Overview
Problem
Conventional probe polishing methods are inefficient and time-consuming, especially when the number of probes increases, as they require significant time for separation and reinstallation of the probe card and result in poor polishing efficiency and increased apparatus size.
Innovation Solution
A probe polishing method using a movable polishing member, specifically an abrasive sheet with a slant portion inclined outwardly downwardly, which is index fed to polish probes in multiple positions, allowing for efficient removal of particles without fully covering the probe area, thereby improving inspection throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the probe card size is increased to measure more devices simultaneously, then the productivity is improved, but the polishing member cannot cover the entire probe area and the device complexity increases
Solution Approach 1:
The probe card is divided into multiple probe arrays, each independently polishable. The polishing member is segmented to correspond to specific probe array regions, allowing selective polishing of different probe areas without requiring a single large polishing member to cover the entire probe card.
Solution Approach 2:
The polishing member is made movable relative to the probe card, allowing it to be positioned at different locations to polish different probe arrays. This dynamic positioning capability enables the same polishing member to serve multiple probe areas sequentially, eliminating the need for multiple fixed polishing members.
2Productivity
If the polishing member size is increased to cover larger probe areas, then the polishing efficiency is improved, but the apparatus size increases
Solution Approach 1:
The polishing member is configured to be movable rather than stationary, allowing a compact polishing member to service a larger probe area through repositioning. This eliminates the need for a large stationary polishing member that would occupy excessive apparatus space.
Solution Approach 2:
A single polishing member is designed to perform multiple polishing functions across different probe arrays by being repositioned. This multi-functional approach allows one compact polishing member to replace what would otherwise require multiple larger polishing members or a very large single polishing member.
3Ease of manufacture
If the probe card is separated and reinstalled for polishing, then the polishing can be performed, but the loss of time increases
Solution Approach 1:
The polishing function is extracted from the probe card assembly process. Instead of separating the probe card for polishing, the polishing member is brought to the probe card location, allowing polishing to be performed in-situ without probe card separation or reinstallation.
Solution Approach 2:
The movable polishing member acts as an intermediary that bridges the probe card and polishing function. It can be positioned at the probe card location to perform polishing without requiring physical separation of the probe card from the apparatus.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables reliable and efficient polishing of probes, even when the probe area is not fully covered, reducing the time required for polishing and preventing apparatus size increase, while maintaining probe arrangement order and preventing damage.
Implementation Method 1
the needle tips of the probes 4A are polished by using a polishing member 7
Data Source
AI summary
In a probe polishing method, a plurality of probes, which are arranged on a probe card for performing an inspection of electrical characteristics of a target object, are polished by using a polishing member. Further, the probes are polished over plural times, while changing a relative position of the abrasive sheet with respect to the probe card.