Micromechanical Probe Positioning With Integrated Feedback Control
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Solution Overview
Problem
Current technologies face challenges in implementing fast and precise control of measurement probe position relative to micro- and nanometer scale targets, particularly in systems requiring simultaneous tests or multiple probes, due to large size, mechanical instability, thermal drifts, and high noise.
Innovation Solution
An integrated measurement and micromechanical positioning apparatus that integrates electronics for measurement and control within a contiguous unit, allowing for precise control of probe position based on measured signals, with closed-loop feedback and real-time adaptability, using a micromechanical positioning actuator, controller, and sensor read-out electronics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate control units and large-size systems are used for probe positioning, then control flexibility and measurement capabilities are improved, but mechanical stability deteriorates due to thermal drifts and vibrations
Solution Approach 1:
The patent combines the probe, positioning actuator, measurement electronics, and control unit into a single integrated probe station. This merging eliminates the need for separate control units and long signal paths, thereby maintaining control flexibility while improving mechanical stability by reducing thermal drifts and mechanical vibrations inherent in distributed systems.
Solution Approach 2:
The integrated probe station acts as an intermediary between the probe and the external control system. By embedding the control unit within the probe station structure, it mediates the connection between external commands and probe positioning, reducing the impact of external thermal and mechanical disturbances on measurement stability.
2Adaptability or versatility
If large-size systems with separate electronics are used, then measurement and control capabilities are improved, but system size and complexity increase
Solution Approach 1:
The patent integrates measurement electronics, positioning control, and probe manipulation functions into a single compact probe station unit. This merging reduces system complexity by eliminating multiple separate components and interconnections, while maintaining full measurement and control capabilities through functional integration.
Solution Approach 2:
The integrated probe station is designed as a multi-functional unit that can perform positioning, measurement, and control operations simultaneously. This universal design allows a single device to replace multiple separate instruments, reducing overall system complexity while enhancing measurement capabilities.
3Productivity
If fast control of probe position is implemented, then test speed and productivity are improved, but positioning precision may deteriorate due to dynamic effects
Solution Approach 1:
The patent implements a feedback control system where the integrated control unit continuously monitors probe position and adjusts actuator commands in real-time. This feedback mechanism enables fast positioning by predicting required adjustments while maintaining precision through continuous correction of dynamic errors such as vibrations and thermal drifts.
Solution Approach 2:
The system employs dynamic positioning control where the actuator and control unit work together to optimize movement speed and precision. By adapting control parameters in real-time based on position feedback, the system achieves fast positioning without sacrificing nanometer-scale precision, resolving the trade-off between speed and accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise, fast, and stable positioning of probes with nanometer-scale accuracy, minimizing mechanical vibrations and thermal drifts, and allowing simultaneous multi-probe measurements with reduced system size and improved signal quality.
Implementation Method 1
a fine movement mechanism that fine-drives the capillary for operating a fine object by a piezoelectric element; a voltage detection means for detecting the voltage the piezoelectric element generates
Data Source
Figure 1a~1b
Figure 2
Figure 3
AI summary
The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).