Probe Station Thermal Compensation via Adaptor and Holder Length Matching
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Solution Overview
Problem
Existing probe stations face challenges in maintaining the precise position of the probe tip relative to the base during temperature changes, which can affect the accuracy of semiconductor component testing.
Innovation Solution
The design incorporates an adaptor, probe holder, and probe with specific thermal coefficients and lengths, where the product of the adaptor's thermal coefficient and length equals the sum of the probe holder's and probe's thermal coefficients and lengths, ensuring that the probe tip's position remains consistent despite temperature changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the probe station components (adaptor, probe holder, probe) are made with different thermal coefficients, then the probe tip position can be maintained during temperature changes, but the device complexity increases due to the need for precise thermal coefficient matching
Solution Approach 1:
The patent applies parameter changes by carefully selecting and matching the thermal coefficients of the adaptor, probe holder, and probe materials. The relationship α1×L1=α2×L2+α3×L3 establishes a specific parameter relationship that compensates for thermal expansion, allowing the probe tip position to remain stable during temperature changes while managing the complexity through deliberate material selection
Solution Approach 2:
The patent directly addresses thermal expansion by designing the adaptor, probe holder, and probe with thermal coefficients that satisfy the equation α1×L1=α2×L2+α3×L3. This ensures that the thermal expansion of the adaptor compensates for the thermal expansion of the probe holder and probe, maintaining probe tip position accuracy during temperature changes
2Measurement precision
If the thermal coefficients and lengths are precisely matched to maintain probe position, then measurement precision is improved, but the ease of manufacture decreases due to stringent material selection requirements
Solution Approach 1:
The patent transforms the manufacturing challenge by establishing a clear parameter relationship (α1×L1=α2×L2+α3×L3) that guides material and dimension selection. This allows manufacturers to achieve the required measurement precision by systematically selecting materials and dimensions that satisfy the thermal compensation equation, rather than relying on trial and error
Solution Approach 2:
The patent applies local quality by assigning different thermal coefficient characteristics to specific components (adaptor, probe holder, probe) based on their functional requirements. Each component is optimized with appropriate material properties to contribute to the overall thermal compensation, allowing precise control over the thermal behavior at different locations in the probe station
3Stability of the object's composition
If the probe holder and probe lengths are made longer to improve positioning stability, then the position maintenance capability is enhanced, but the device complexity increases due to longer component dimensions
Solution Approach 1:
The patent uses parameter changes by establishing the thermal compensation relationship α1×L1=α2×L2+α3×L3, which links the lengths of the adaptor, probe holder, and probe to their thermal coefficients. This allows the system to achieve position stability through optimized dimensional parameters that work together with material properties, rather than simply increasing component lengths
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the easy maintenance of the probe tip's position relative to the base during temperature increases or decreases, regardless of the magnitude of the change, enhancing the accuracy and reliability of semiconductor testing.
Implementation Method 1
A product of a first thermal coefficient of the adaptor and the first length is equal to a sum of a product of a second thermal coefficient of the probe holder and the second length and a product of a third thermal coefficient of the probe and the third length
Data Source
AI summary
A probe station includes a base, a adaptor, a probe holder and a probe. The adaptor has a first portion and a second portion away from the first portion towards a first direction by a first length. The first portion connects to the base. A probe holder connects to the second portion and extends towards a second direction opposite to the first direction by a second length. The probe connects to an end of the probe holder away from the second portion and extends towards the second direction by a third length. A product of a thermal coefficient of the adaptor and the first length is equal to a sum of a product of a thermal coefficient of the probe holder and the second length and a product of a thermal coefficient of the probe and the third length.