Scanning Probe Tilt Alignment for Surface Topography

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Solution Overview

Problem

Conventional scanning probe microscopes face challenges in accurately aligning probes with sample surfaces, particularly when dealing with misalignment issues that can lead to incomplete or distorted data collection, especially when imaging soft or fragile samples.

Innovation Solution

A method involving the tilting of the probe or sample to collect data sets from different orientations, allowing for the analysis of initial data to determine and correct misalignment, thereby improving the accuracy and completeness of sample surface maps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the probe is kept in a fixed vertical orientation during scanning, then the alignment procedure is simple, but misalignment between the probe and sample surface leads to incomplete or distorted data collection

Engineering Contradiction:
Improvealignment accuracyVSAvoidscanning system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The probe orientation is changed from fixed to dynamic, allowing tilting at multiple angles during scanning. This enables the probe to adapt to misalignment issues and access previously inaccessible sample features, directly improving measurement precision without requiring complex realignment procedures

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The scanning system introduces an additional adjustable parameter (tilt angle) to the traditionally fixed vertical orientation. By varying the tilt angle, the system can compensate for misalignment and improve data collection accuracy, transforming a static scanning approach into a flexible one that adapts to sample variations

Inventive Principle:
Principle #35Parameter changes

2Loss of information

If the probe is tilted to access inaccessible features, then data completeness improves, but the scanning procedure becomes more complex

Engineering Contradiction:
Improvedata completenessVSAvoidscanning operation simplicity
Core Design Contradiction:
Loss of informationVSEase of operation

Solution Approach 1:

The system performs preliminary scanning at the default vertical orientation to identify inaccessible features, then automatically adjusts the tilt angle to access those features. This staged approach ensures data completeness while maintaining operational simplicity through automated control

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The scanning system uses feedback from initial scans to determine when tilting is necessary. By monitoring data quality and feature accessibility, the system automatically adjusts probe orientation only when needed, improving data completeness without requiring manual intervention or complex operational procedures

Inventive Principle:
Principle #23Feedback

3Measurement precision

If multiple scans are performed at different tilt angles, then measurement accuracy improves, but scanning time increases

Engineering Contradiction:
Improvesurface mapping accuracyVSAvoidscanning duration
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system performs tilting only partially - specifically, only when misalignment or inaccessible features are detected during initial scanning. This selective approach improves measurement precision for problematic areas without requiring exhaustive multi-angle scanning of the entire sample, thereby reducing time loss

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances data collection by enabling more precise alignment and access to features that would otherwise be inaccessible, resulting in more accurate and comprehensive surface topography data.

Implementation Method 1

the force interaction between the sample and the sharp tip of a probe is monitored

Methodology Applied
Scientific EffectForce interaction: Force

Implementation Method 2

the tip moves either towards or away from the surface. This tip movement is communicated to the cantilever part of the probe, which accordingly bends or flexes along its length

Methodology Applied
Scientific EffectCantilever deflection: Elasticity

Implementation Method 3

Scanners typically employ piezoelectric stack or tube actuators. These actuators are based on applying a voltage to a piezoelectric material to generate movement

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 4

Deflection, in this context, refers to the tilt of an upper surface of the probe, which is used by the AFM to provide an indication of cantilever bend. A light beam is directed towards the upper surface of the probe, above its tip, and reflected towards a position sensitive detector

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS9134340B2Method of investigating a sample surface
Publication Date: 2015.09.15 INFINITESIMA LTD
  • US9134340B2 patent drawing
  • US9134340B2 patent drawing
  • US9134340B2 patent drawing

AI summary

A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analyzing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.