Scanning Probe Microscope Tip Tracking With Vision Calibration

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Solution Overview

Problem

Existing scanning probe microscopes face challenges in accurately tracking and correcting errors in the scanning motion, leading to inaccuracies in image data and measurement precision.

Innovation Solution

A scanning probe microscope system that includes a first actuator for scanning motion, a steering element, a vision system, a tracking control system, and a calibration system to adjust reference data based on apparent motion measurements, ensuring the field of view follows the scanning motion synchronously and corrects for errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a second scanner is added to move the focus position synchronously with the probe, then measurement accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvemeasurement accuracyVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses a vision system to capture optical images of the probe and creates a digital representation of probe position through image analysis. This optical copy replaces the need for a second physical scanner, as the image data provides positional information without requiring additional mechanical scanning components.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent replaces the mechanical second scanner with an optical vision system and image analysis approach. Instead of using a second mechanical scanning device to track probe position, the system uses light-based imaging and computational analysis to achieve the same tracking function with reduced mechanical complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If reference data is stored to correlate scanning and tracking motions, then tracking accuracy is improved, but calibration time and complexity increase

Engineering Contradiction:
Improvetracking accuracyVSAvoidcalibration time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The vision system continuously captures real-time images of the probe during operation, automatically updating the apparent position without requiring separate calibration procedures. The system self-calibrates by continuously comparing expected probe position with actual visual position, eliminating the need for time-consuming manual calibration processes.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent implements a feedback loop where the vision system continuously monitors probe position and feeds this information back to the control system. The control system uses this feedback to adjust tracking commands in real-time, continuously improving tracking accuracy without requiring repeated calibration cycles.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances measurement accuracy by minimizing apparent motion and errors in tracking, allowing for precise scanning and imaging of samples with improved precision and reliability.

Implementation Method 1

a vision system configured to collect light from a field of view to generate image data

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3646037B1Scanning probe microscope
Publication Date: 2025.11.19 INFINITESIMA LTD
  • EP3646037B1 patent drawingFigure 1
  • EP3646037B1 patent drawingFigure 2~5
  • EP3646037B1 patent drawingFigure 6

AI summary

A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.