Semiconductor Prober Dew Point Zoning to Reduce Dry Gas Use
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Solution Overview
Problem
As wafers become larger and more highly integrated, the challenge of preventing dew condensation during semiconductor testing increases, leading to potential device failure and higher costs due to excessive dry gas consumption.
Innovation Solution
A prober system that includes multiple areas with different set dew points, controlled by a controller that adjusts dry gas supply based on the specific dew point requirements of each area, thereby optimizing dry gas usage and preventing dew condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dry air purge is performed over the whole areas including conveyance areas in addition to test areas, then dew condensation is prevented in all areas, but large quantities of dry air are consumed and costs increase
Solution Approach 1:
The prober is divided into multiple areas (test areas and conveyance areas) with independently controllable dry air supply. Each area has its own dry air supply unit that can be controlled separately based on dew condensation risk, allowing dry air to be supplied only where necessary rather than uniformly across the entire system.
Solution Approach 2:
Different areas of the prober are assigned different dew point settings according to their specific requirements. Test areas, where devices are actually tested, have lower dew points to prevent dew condensation on devices, while conveyance areas have higher dew points. This localized quality approach ensures adequate protection where needed while reducing unnecessary dry air consumption in areas with lower risk.
2Productivity
If multi-stage prober configuration is used to increase testing throughput, then testing efficiency is improved, but the number of areas increases and dry air consumption increases
Solution Approach 1:
Each stage of the multi-stage prober is segmented into distinct areas with independent dry air supply control. This allows the system to scale productivity through multiple stages while controlling dry air consumption by only supplying dry air to areas where dew condensation risk exists, rather than supplying it to all areas of all stages uniformly.
Solution Approach 2:
Dry air is supplied at minimum necessary quantities to specific areas where dew condensation risk is identified, rather than supplying excessive dry air to all areas. The supply amount is optimized to be just sufficient for dew condensation prevention in critical areas, reducing overall consumption while maintaining protection where needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces dry gas consumption while maintaining effective dew point control across various areas of the prober, enhancing testing efficiency and reducing costs.
Implementation Method 1
a plurality of areas for each or which a set dew point for preventing dew condensation is set, the set dew points being different from each other; a supply unit that supplies dry gas to the respective areas
Data Source
AI summary
A prober according to an embodiment tests the electrical characteristics of semiconductor devices formed on a wafer. The prober includes: a plurality of areas for each of which a set dew point for preventing dew condensation is set, the set dew points being different from each other; a supply unit that supplies dry gas to the respective areas; and a controller that controls supply of the dry gas from the supply unit. The controller controls supply of the dry gas to the respective areas so that dew points in the respective areas become the set dew points.