Prober Probe Head Automatic Replacement Mechanism

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Solution Overview

Problem

The increasing diameter of semiconductor wafers has made it difficult to replace the probe head in existing probers due to the weight and size of the probe card, which requires manual intervention and detachment from the main body, increasing costs and operational burdens.

Innovation Solution

A prober design that includes a moving device within the main body to facilitate the automatic replacement of the probe head without detaching the card, using a vacuum attraction device and position marks for precise alignment, allowing the probe head to be replaced independently without operator intervention.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the probe card is enlarged to accommodate larger diameter wafers, then the wafer inspection capability is improved, but the weight of the probe card increases making it difficult to handle and replace

Engineering Contradiction:

Improveprobe card areaVSAvoidprobe card weight

Core Design Contradiction:

Area of stationary objectVSWeight of moving object

Solution Approach 1:

The probe card is divided into two separate components: a stationary card body that remains in the prober and a detachable probe head that can be easily replaced. This segmentation allows the large-area card to remain fixed while only the smaller, lighter probe head needs to be handled during replacements, resolving the contradiction between large area and manageable weight.

Inventive Principle:

Principle #1Segmentation

2Ease of repair

If the probe card is detached from the main body for probe head replacement, then the probe head can be replaced, but the operational complexity and time required increase

Engineering Contradiction:

Improveprobe head replaceabilityVSAvoidreplacement procedure complexity

Core Design Contradiction:

Ease of repairVSDevice complexity

Solution Approach 1:

The probe head is extracted as a separate, independently replaceable component from the card body. The card remains permanently mounted in the prober, and only the probe head needs to be removed and reattached for replacements, eliminating the need to detach the entire card and simplifying the replacement procedure.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The card is pre-mounted and fixed to the card holder within the prober before operation begins. This preliminary action of securing the card in place eliminates the need for repeated attachment and detachment during probe head replacements, reducing operational complexity and time requirements.

Inventive Principle:

Principle #10Preliminary action

3Ease of repair

If manual intervention is required for probe head replacement, then the replacement can be performed, but the operational burden and safety risks increase

Engineering Contradiction:

Improveprobe head replaceabilityVSAvoidreplacement operation ease

Core Design Contradiction:

Ease of repairVSEase of operation

Solution Approach 1:

The system enables automatic probe head replacement through a moving device that can autonomously remove the old probe head and install a new one. The card holder with its moving device performs the replacement operation without requiring operator intervention, reducing operational burden and safety risks while maintaining ease of repair.

Inventive Principle:

Principle #25Self-service

4Reliability

If the entire probe card is replaced when probe needles wear out, then all probe needles are replaced, but the cost increases significantly

Engineering Contradiction:

Improveprobe needle functionalityVSAvoidreplacement cost

Core Design Contradiction:

ReliabilityVSLoss of substance

Solution Approach 1:

The probe card is segmented into a durable, reusable card body and a replaceable probe head containing the probe needles. When probe needles wear out, only the probe head needs to be replaced rather than the entire expensive card, significantly reducing replacement costs while maintaining reliability of the probe needle functionality.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy and automated replacement of the probe head within the prober, reducing manual handling and operational burdens, improving safety and efficiency while avoiding the need for costly card replacements.

Implementation Method 1

a moving device provided within the main body and configured to be moved toward the card while holding the probe head thereon

Methodology Applied

Scientific EffectVacuum attraction: Vacuum

Data Source

PatentUS10082524B2Prober in which probe head of probe card is replaced automatically

Publication Date: 2018.09.25 TOKYO ELECTRON LTD

AI summary

A prober in which a probe head can be easily replaced is provided. A prober 10 includes a main body 12; a stage 11 provided within the main body 12 and configured to place a wafer W thereon; a card 16 provided within the main body 12 to face the stage 11; and a probe head holder 24 provided within the main body 12 and configured to be moved toward the card 16. The card 16 includes a probe head 30 which is detachably attached to the card 16 and has a multiple number of probe needles 35, and the probe head holder 24 is moved toward the card 16 while holding the probe head 30 thereon.