In-situ Process Tube Abnormality Detection via Doppler and Refraction
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Solution Overview
Problem
In semiconductor manufacturing, detecting abnormalities such as bubbles, particles, or debris in the fluid transferred through tubular devices is challenging, leading to impurity defects in substrates and inefficiencies in the manufacturing process due to the need for separate defect inspection tools.
Innovation Solution
The implementation of a process tube device equipped with sensor arrays and a light emitting source allows for the in-situ detection of bubbles and other impurities by measuring changes in fluid velocity and light refraction patterns, eliminating the need for separate inspection tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate defect inspection tools are used to detect abnormalities in substrates, then detection capability is provided, but processing time increases significantly and manufacturing efficiency decreases
Solution Approach 1:
The patent implements preliminary detection of fluid abnormalities (bubbles, particles, debris) within the process tube before the fluid contacts the substrate. By using sensors positioned in the fluid path to detect impurities advance, the system prevents defective fluid from reaching the substrate, eliminating the need for time-consuming post-processing inspection and reducing overall manufacturing time.
2Reliability
If separate defect inspection tools are used to inspect substrates, then abnormalities can be detected, but the entire surface inspection process is time-consuming and occurs after processing is completed
Solution Approach 1:
The patent implements a real-time feedback system where sensors continuously monitor the fluid for abnormalities and provide immediate signals to the control system. When impurities are detected, the system automatically adjusts fluid flow or alerts operators, enabling continuous process optimization without stopping production, thereby maintaining both high reliability and productivity.
3Loss of time
If in-situ detection of fluid abnormalities is implemented, then real-time detection is achieved, but device complexity increases due to additional sensors and light emitting sources
Solution Approach 1:
The patent employs a multi-functional sensor array system where the same sensor configuration detects multiple types of abnormalities (bubbles, particles, debris) simultaneously using light refraction and fluid velocity measurements. This universal detection approach eliminates the need for separate specialized sensors for each abnormality type, reducing overall device complexity while maintaining comprehensive real-time monitoring capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables real-time, quantitative detection of fluid abnormalities, preventing impurity defects and improving manufacturing efficiency by allowing for immediate action to remove defective fluid from the process.
Implementation Method 1
measuring changes in fluid velocity and light refraction patterns
Implementation Method 2
measuring changes in fluid velocity
Data Source
AI summary
A process tube device can detect the presence of any external materials that may reside within a fluid flowing in the tube. The process tube device detects the external materials in-situ which obviates the need for a separate inspection device to inspect the surface of a wafer after applying fluid on the surface of the wafer. The process tube device utilizes at least two methods of detecting the presence of external materials. The first is the direct measurement method in which a light detecting sensor is used. The second is the indirect measurement method in which a sensor utilizing the principles of Doppler shift is used. Here, contrary to the first method that at least partially used reflected or refracted light, the second method uses a Doppler shift sensor to detect the presence of the external material by measuring the velocity of the fluid flowing in the tube.