Programmable Connection Segments for Post-Fabrication Circuit Reconfiguration

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Solution Overview

Problem

Conventional microelectronic circuits face limitations in modifying circuit elements after microfabrication, requiring constant power to keep added circuit elements on or off and necessitating new photomasks for connections or disconnections, which is costly and slows down throughput.

Innovation Solution

Incorporating programmable materials, such as phase-changeable materials, that can be switched between conductive and non-conductive states using current patterns, allowing for dynamic on/off control of horizontal connections between conductive lines after microfabrication without the need for new photomasks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional photomasks are used to modify circuit connections after microfabrication, then circuit functionality can be changed, but manufacturing cost increases and throughput slows down

Engineering Contradiction:
Improvecircuit reconfigurabilityVSAvoidmanufacturing throughput
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent applies preliminary action by pre-forming programmable connection segments during the standard microfabrication process. These segments are prepared in advance with phase-changeable materials that can be later programmed to establish or break connections. This eliminates the need for additional photomask steps after fabrication, thereby maintaining high manufacturing throughput while enabling post-fabrication circuit reconfiguration.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by employing phase-changeable materials that can transition between conductive and non-conductive states through controlled heating. This allows the same physical structure to serve multiple circuit configuration functions without requiring additional manufacturing steps, thus improving adaptability without sacrificing productivity.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If new photomasks are created to add or remove circuit elements, then circuit design can be modified, but manufacturing cost increases

Engineering Contradiction:
Improvecircuit design flexibilityVSAvoidmanufacturing cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent applies universality by creating a single set of photomasks that can serve multiple circuit configuration purposes. The programmable connection segments can be programmed to implement different circuit designs by changing the programming patterns rather than creating new photomasks. This multi-functional approach allows the same hardware structure to support various circuit configurations, reducing photomask costs while maintaining design flexibility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If constant power is applied to keep added circuit elements on or off, then circuit functionality is maintained, but power consumption increases

Engineering Contradiction:
Improvecircuit functionalityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent applies periodic action by using pulsed current programming to change the phase state of connection segments. The phase-changeable materials are switched between conductive and non-conductive states through brief, periodic programming pulses rather than requiring continuous power application. This allows the circuit configuration to be maintained without constant power, reducing power consumption while ensuring reliable circuit functionality.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible and efficient reconfiguration of circuit designs by allowing circuit blocks to be turned on or off independently of power status, reducing operational power requirements and simplifying the manufacturing process.

Implementation Method 1

The phase changeable material can be changed from conducting to non-conducting after microfabrication by using a pattern of current delivered to the phase changeable material

Methodology Applied
Scientific EffectPhase change: Phase Change

Data Source

PatentUS11694957B2Programmable connection segment and method of forming the same
Publication Date: 2023.07.04 TOKYO ELECTRON LTD
  • US11694957B2 patent drawing
  • US11694957B2 patent drawing
  • US11694957B2 patent drawing

AI summary

In a semiconductor device, a device structure is positioned over a substrate, where the device structure includes devices. A wiring structure of the semiconductor device is positioned over the substrate and coupled to at least one of the devices. The wiring structure includes at least one of programmable lines and programmable vertical interconnects, where the programmable lines extend along a top surface of the substrate and the programmable vertical interconnects extend along a vertical direction perpendicular to the top surface of the substrate. The programmable lines and the programmable vertical interconnects include a programmable material having a modifiable resistivity in that the programmable lines and the programmable vertical interconnects change between being conductive and being non-conductive in responsive to a current pattern delivered to the programmable lines and the programmable vertical interconnects.